MEMS for detection of environmental pollutants: A review pertains to sensors over a couple of decades in 21st century

Shinde, Pramod B.; Shiurkar, Ulhas D.

doi:10.1016/j.matpr.2020.10.596

Cited by 4 publications

(3 citation statements)

References 72 publications

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“…Since sensors should be characterized as having a high sensitivity, accuracy in the ppm range, and second range response for target chemical analytes, an appropriate option for a cost-effective and miniature devices is the use of micromachining as a fabrication technology. Micromachining is compatible with the microfabrication flow of the electronic chips serving as power conditioning systems for the further processing of sensor signals [3,4]. Among these, cantilevers and capacitive-and acoustic-wave-based microsensors have exhibited a great potential for integration with electronics and the realization of complete products for market needs [5].…”

Section: Introductionmentioning

confidence: 99%

Unlocking the Carbyne-Enriched Nanocoating Sensitivity to Volatile Organic Vapors with Plasma-Driven Deposition onto Bulk Micromachined Silicon Membranes

et al. 2022

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Due to the unique combination of physicochemical and structural properties of carbyne-enriched nanocoatings, they can be used for the development of high-end electronic devices. We propose using it for the development of sensor platforms based on silicon bulk micromachined membranes that serve as a part of microcapacitors with flexible electrodes, with various sizes and topologies. The carbyne-enriched nanocoating was grown using the ion-assisted pulse-plasma deposition method in the form of 2D-ordered linear-chain carbon with interchain spacing in the range of approximately 4.8–5.03 Å. The main characteristics of the fabricated sensors, such as dynamic range, sensitivity, linearity, response, and recovery times, were measured as a function of the ethanol concentration and compared for the different sizes of the micromembranes and for the different surface states, such as patterned and non-patterned. The obtained results are the first step in the further optimization of these sensor platforms to reach more precise detection of volatile organic compounds for the needs of the healthcare, air monitoring, and other relevant fields of human health.

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Section: Introductionmentioning

confidence: 99%

Unlocking the Carbyne-Enriched Nanocoating Sensitivity to Volatile Organic Vapors with Plasma-Driven Deposition onto Bulk Micromachined Silicon Membranes

et al. 2022

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“…Over the last few decades, the field of micro metal coils has evolved rapidly due to the widespread application of micro metal coils in fields such as consumer electronics, the automobile industry, aerospace, machinery, the chemical industry, medicine, among others [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15]. Among the various types of micro metal coils, the coils based on MEMS technology and flexible electronic technology have greater research value [1][2][3][4][5][6][7][8].…”

Section: Introductionmentioning

confidence: 99%

Recent Progress in the Preparation Technologies for Micro Metal Coils

et al. 2022

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The recent development of micro-fabrication technologies has provided new methods for researchers to design and fabricate micro metal coils, which will allow the coils to be smaller, lighter, and have higher performance than traditional coils. As functional components of electromagnetic equipment, micro metal coils are widely used in micro-transformers, solenoid valves, relays, electromagnetic energy collection systems, and flexible wearable devices. Due to the high integration of components and the requirements of miniaturization, the preparation of micro metal coils has received increasing levels of attention. This paper discusses the typical structural types of micro metal coils, which are mainly divided into planar coils and three-dimensional coils, and the characteristics of the different structures of coils. The specific preparation materials are also summarized, which provides a reference for the preparation process of micro metal coils, including the macro-fabrication method, MEMS (Micro-Electro-Mechanical System) processing technology, the printing process, and other manufacturing technologies. Finally, perspectives on the remaining challenges and open opportunities are provided to help with future research, the development of the Internet of Things (IoTs), and engineering applications.

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“…Micro-electro-mechanical systems (MEMS) comprise both mechanical and electronic components manufactured on a common silicon substrate, and have gained significant attention in the last three decades. Due to the miniaturized size, low cost, high manufacturing throughput, and expectance of superior performance, MEMS are used in a wide range of consumer, automotive, medical, and industrial products [1,2]. With the increase in the integration density and the reduction in the feature size, high-aspect-ratio (HAR) structures in silicon play an increasingly important role in micro-sensors and actuators [3,4].…”

Section: Introductionmentioning

confidence: 99%

MEMS High Aspect Ratio Trench Three-Dimensional Measurement Using Through-Focus Scanning Optical Microscopy and Deep Learning Method

Shi

Gao

et al. 2022

Applied Sciences

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High-aspect-ratio structures have become increasingly important in MEMS devices. In situ, real-time critical dimension and depth measurement for high-aspect-ratio structures is critical for optimizing the deep etching process. Through-focus scanning optical microscopy (TSOM) is a high-throughput and inexpensive optical measurement method for critical dimension and depth measurement. Thus far, TSOM has only been used to measure targets with dimension of 1 μm or less, which is far from sufficient for MEMS. Deep learning is a powerful tool that improves the TSOM performance by taking advantage of additional intensity information. In this work, we propose a convolutional neural network model-based TSOM method for measuring individual high-aspect-ratio trenches on silicon with width up to 30 μm and depth up to 440 μm. Experimental demonstrations are conducted and the results show that the proposed method is suitable for measuring the width and depth of high-aspect-ratio trenches with a standard deviation and error of approximately a hundred nanometers or less. The proposed method can be applied to the semiconductor field.

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MEMS for detection of environmental pollutants: A review pertains to sensors over a couple of decades in 21st century

Cited by 4 publications

References 72 publications

Unlocking the Carbyne-Enriched Nanocoating Sensitivity to Volatile Organic Vapors with Plasma-Driven Deposition onto Bulk Micromachined Silicon Membranes

Unlocking the Carbyne-Enriched Nanocoating Sensitivity to Volatile Organic Vapors with Plasma-Driven Deposition onto Bulk Micromachined Silicon Membranes

Recent Progress in the Preparation Technologies for Micro Metal Coils

MEMS High Aspect Ratio Trench Three-Dimensional Measurement Using Through-Focus Scanning Optical Microscopy and Deep Learning Method

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