MEMS tunable filters based on DGS and waveguide structures: a literature review

Mirebrahimi, Seyyed Mehdi; Dousti, Massoud; Afrang, Saeid

doi:10.1007/s10470-021-01862-7

Cited by 9 publications

(3 citation statements)

References 69 publications

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“…In recent years, filters have become a new research hotspot, and some filters based on new materials and new theories have emerged, such as filters based on graphene materials [ 1 ], filters based on silicon nitride [ 2 , 3 ], filters based on photon quantum theory [ 4 , 5 ], the mathematical model of filters [ 6 ], and filters integrated with a micro-electro-mechanical system (MEMS) switch [ 7 , 8 , 9 , 10 ]. The radio frequency of a micro-electro-mechanical system (RF MEMS) tunable filter, which is a type of electronic component that controls signals by RF MEMS switches, and offers higher integration, lower power dissipation, smaller size, better linearity, and better performance in frequency adjustment than conventional filters [ 11 ].…”

Section: Introductionmentioning

confidence: 99%

Design and Fabrication of a MEMS Bandpass Filter with Different Center Frequency of 8.5–12 GHz

Zhang

Min

2023

Micromachines

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The design simulation and fabrication results of a bandpass filter based on micro-electro-mechanical system (MEMS) switches are presented in this paper. The MEMS filter element consists of a MEMS capacitance switch and two resonant rings that are fixed onto coplanar waveguide lines through anchor points. The micromachine characteristics of the filter could be optimized to change the center frequency from 8.5 to 12 GHz by improving the geometrical parameters; other electrical parameters of the filter, such as stopband rejection, insertion loss, and return loss at each center frequency, were simulated and calculated. In order to evaluate the MEMS filter design methodology, a filter working at 10.5 GHz fabricated with an aluminum top electrode was used, and it displayed a low insertion loss of 1.12 dB and a high stopband rejection of 28.3 dB. Compared with the simulation results, these proposed filter showed better electrical performance. Our results demonstrated that the filter with the integrated RF MEMS switch not only provides the benefit of reduced size compared with a traditional filter, but also improves stopband rejection, insertion loss, and return loss.

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Section: Introductionmentioning

confidence: 99%

Design and Fabrication of a MEMS Bandpass Filter with Different Center Frequency of 8.5–12 GHz

Zhang

Min

2023

Micromachines

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“…According to the used technologies and materials, varactors can be divided into microelectromechanical systems (MEMS) varactors, semiconductor varactors, ferrite varactors and ferroelectric varactors [10][11][12][13]. Among those varactors, ferroelectric varactors have attracted tremendous attention due to advantages of large power handling, high-tuning speed, long switching lifetime and so on [14].…”

Section: Introductionmentioning

confidence: 99%

Enhanced Tunability Achieving at Low Permittivity and Electric Field in (Ba0.91Ca0.09)(SnxZr0.2−xTi0.8)O3-2 mol% CuO-1 mol% Li2CO3 Ceramics

et al. 2023

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Ferroelectric varactors should have high tunability at low permittivity and a working electric field to obtain better impedance matching and stable tunability. In this work, (Ba0.91Ca0.09)(SnxZr0.2−xTi0.8)O3-2 mol% CuO-1 mol% Li2CO3 (abbreviated as BCSZT100x, x = 0.05, 0.10, 0.15 and 0.20, respectively) are prepared to achieve high tunability at low permittivity and a working electric field. The tunable mechanisms are investigated based on crystal structure, micro-morphology and the permittivity-temperature spectrum. The results show that the shrink of oxygen octahedron and weaker interaction force between Sn4+ and O2− make BCSZT5 ceramic have a higher tunability value of 26.55% at low permittivity (1913) and a working electric field (7.3 kV/cm). The tunability value of BCSZT5 ceramic increases by 58%, while its permittivity decreases by 25%, compared with x = 0. Those advantages make BCSZT5 ceramic have substantial application prospects in varactors.

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“…Electrostatic MEMS actuators are devices that utilize electrostatic forces to generate mechanical motion at the microscale. They can be used in various applications, including filter [2], aerospace [3], biomedical [4], communication [5], and logic-gates [6].…”

Section: Introductionmentioning

confidence: 99%

Nonlinear Dynamic Analysis of an Electrostatically Actuated Clamped–Clamped Beam and Excited at the Primary and Secondary Resonances

Alneamy

2023

Micromachines

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This work investigates the primary and secondary resonances of an electrostatically excited double-clamped microbeam and its feasibility to be used for sensing applications. The sensor design can be excited directly in the vicinity of the primary and secondary resonances. This excitation mechanism would portray certain nonlinear phenomena and it would certainly lead in increasing the sensitivity of the device. To achieve this, a nonlinear beam model describing transverse deflection based on the Euler–Bernoulli beam theory was utilized. Then, a reduced-order model (ROM) considering all geometric and electrical nonlinearities was derived. Three different techniques involving time domain, fast Fourier transforms (FFTs), and frequency domain (FRCs) were used to examine the appearance of subharmonic resonance of order of one-half under various excitation waveforms. The results show that higher forcing levels and lower damping are required to activate this resonance. We note that as the forcing increases, the size of the instability region grows fast and the size of the unstable region increases rapidly. This, in fact, is an ideal place for designing bifurcation inertia MEMS sensors.

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MEMS tunable filters based on DGS and waveguide structures: a literature review

Cited by 9 publications

References 69 publications

Design and Fabrication of a MEMS Bandpass Filter with Different Center Frequency of 8.5–12 GHz

Design and Fabrication of a MEMS Bandpass Filter with Different Center Frequency of 8.5–12 GHz

Enhanced Tunability Achieving at Low Permittivity and Electric Field in (Ba0.91Ca0.09)(SnxZr0.2−xTi0.8)O3-2 mol% CuO-1 mol% Li2CO3 Ceramics

Nonlinear Dynamic Analysis of an Electrostatically Actuated Clamped–Clamped Beam and Excited at the Primary and Secondary Resonances

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