2003
DOI: 10.1063/1.1591081
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Mesoscale x-ray diffraction measurement of stress relaxation associated with buckling in compressed thin films

Abstract: Compressed thin films deposited on substrates may buckle depending on the geometrical and mechanical properties of the film/substrate set. Until recently, the small dimensions of the buckling have prevented measurements of their local in plane internal stress distribution. Using a scanning x-ray microdiffraction technique developed at a third generation x-ray synchrotron source, we obtained thin film internal stress maps for circular blisters and telephone chord buckling with micrometric spatial resolution. A … Show more

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Cited by 25 publications
(18 citation statements)
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“…Thin film buckling is observed over 150 nm film thickness. 29 Phase analysis by XRD measurements shows that W crystallites exhibit two different phases: the equilibrium pure W phase, called a-W which has a bodycentered cubic-bcc-structure (space group Im-3 m) and a second one called b-W having an A15 cubic structure (space group Pm-3n) which is stabilized by a low impurity (O, C) concentration. 30 The volume fraction of the b-W phase has been estimated to be about 10% by the method given in Ref.…”
Section: Pure W Thin Filmmentioning
confidence: 99%
“…Thin film buckling is observed over 150 nm film thickness. 29 Phase analysis by XRD measurements shows that W crystallites exhibit two different phases: the equilibrium pure W phase, called a-W which has a bodycentered cubic-bcc-structure (space group Im-3 m) and a second one called b-W having an A15 cubic structure (space group Pm-3n) which is stabilized by a low impurity (O, C) concentration. 30 The volume fraction of the b-W phase has been estimated to be about 10% by the method given in Ref.…”
Section: Pure W Thin Filmmentioning
confidence: 99%
“…Stress in the buckled film is distributed nonhomogeneously so that in regions adherent to the substrate, the stress may be high, while top regions are less stressed. 16 Evolution of stress magnitude and density in BTO s-s films with thermal annealing was investigated. Our findings are as follows:…”
Section: Stress Relaxation By Shape Changementioning
confidence: 99%
“…Today, most synchrotron facilities can provide such a small beam size in a routine manner (Tamura et al, 2002;Ice et al, 2011;Bertrand et al, 2012), which has opened new possibilities for structural mapping of heterogeneous samples. In particular, X-ray powder diffraction imaging has been extensively used in several area of materials science (Goudeau et al, 2003;Xu et al, 2012;Vaxelaire et al, 2014), including the study of ancient artefacts (Dooryhé e et al, 2005;De Nolf & Janssens, 2010).…”
Section: Introductionmentioning
confidence: 99%