Micro-cantilevers for gas sensing

Morata, M.; Amirola, J.; Figueras, E.; Fonseca, L.; Santander, J.; Gràcia, I.; Domínguez, M.; Rodriguez, A.; Horrillo, M.C.; Cané, C.

doi:10.1109/sced.2005.1504516

Cited by 5 publications

(2 citation statements)

References 3 publications

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“…Most cantilever sensors used for chemical detection are based on optical detection of deflection (39). Given the limitations of optical sensors for many applications, in recent years a number of groups have moved to piezoelectric or piezoresistive microcantilever detection schemes (40)(41)(42)(43). Piezoresistive sensors are preferable over piezoelectric due to their ability to measure static changes in deflection, compared to piezoelectric sensing where dynamic measurements are made to overcome the problems with charge leakage currents.…”

Section: Cantilever Designmentioning

confidence: 99%

The Metal Organic Films for Tailorable Chemical Sensing on Microcantilevers

et al. 2009

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A new generation of versatile microcantilever sensors with tailorable nanoporous metal-organic frameworks (MOFs) has been successfully demonstrated. Two metal-organic frameworks (MOFs), HKUST-1 and MOF-508 were characterized to demonstrate new stress-induced sensing mechanism. The microcantilever sensors were fabricated on silicon-on-insulator (SOI) wafers with 1 µm thickness of the final beam. The results exhibited extraordinary sensitivity, and a selective reversible response for chemical detection (1). Metal-organic frameworks (MOFs) are attracting attention as the ideal material for sensing applications because of their nanoporosity, ultrahigh surface area, and the fact that they can be tailored for adsorption of specific analytes (1). In this work, HKUST-1 was prepared and characterized to demonstrate that different MOFs can detect multiple analytes with microcantilever array (2). The elastic properties of MOFs were measured by nanoindentation test (MTS Nano-Indentor XP) and Raman microscope (Renishaw) was used to characterize coated MOFs-thin films on gold compared with MOFs powders.

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Section: Cantilever Designmentioning

confidence: 99%

The Metal Organic Films for Tailorable Chemical Sensing on Microcantilevers

et al. 2009

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“…The design of cantilevers with high sensitivity to surface stress has revolved around the use of varied geometries, stress concentration regions (SCRs) [6] and high-gagefactor materials such as single crystal silicon (SCS) [7][8][9][10][11]. A number of existing surface-stress-sensitive piezoresistive microcantilever designs use multilayered cantilever structures [11][12][13][14], as opposed to initial work on cantilever sensors, which was based on all-silicon cantilever probes [7]. Multilayered cantilever designs allow for the use of structural layers with low Young's moduli that make the cantilever more sensitive to surface stress.…”

Section: Current Cantilever Designsmentioning

confidence: 99%

A piezoresistive microcantilever array for surface stress measurement: curvature model and fabrication

Choudhury

Hesketh

Thundat

et al. 2007

J. Micromech. Microeng.

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This paper presents a procedure for the fabrication of a piezoresistive microcantilever array for surface-stress-based chemical and biochemical sensing applications. All existing microcantilever surface stress sensors that are based on single-crystal silicon use p-doped piezoresistors. In this work, the advantages of using n-doped silicon piezoresistors for surface stress sensing have been demonstrated. Further, a new model for surface-stress-sensitive cantilevers, based on classical laminated plate theory, is presented. This model allows for the estimation of the deformation and piezoresistive response of a multilayered microcantilever to surface stresses during analyte measurement and residual stresses in the structural layers due to fabrication processes. Also, the model accounts for bending–stretching coupling in the microcantilever response to the stresses. The utility of the model as a design tool for control of cantilever curvature during the fabrication process has been demonstrated.

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