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Cantilevers fabricated from a SO1 wafers using bulk micromachining are used in combination with polymer deposition to detect down to 25ppm of toluene concentration in synthetic air. The cantilevers proposed are thermoelectrically actuated and the movement detection is done by piezoresistance in a Wheatstone bridge configuration.

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Devices studied in this work consist of monocrystalline Silicon micromachined cantilevers, obtained through the bulk micromachining of a BESOl (Back Etch Silicon On Insulator) wafer. Cantilevers are functionalized by means of a sensitive polymer layer. These devices have been employed in the detection of Volatile Organic Compounds (VOCs) through different transduction principles. State-of-thc-art sensitivities have been obtained.