Micromachined silicon microcantilevers for gas sensing applications with capacitive read-out

Amirola, J.; Rodríguez, Ángel; Castañer, Luís; Santos, J.P.; Gutiérrez, J.; Horrillo, M.C.

doi:10.1016/j.snb.2005.07.053

Cited by 40 publications

(26 citation statements)

References 6 publications

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“…Similar detection limits for gaseous toluene as those achieved with the detection PCS fibers have been determined with sensors which employed other sensing principles such as multiplexed cantilevers [8,9] or electrical resistance of thick films or bulk materials [10][11][12][13]. Very promising results on a level of 5 lg/l have been achieved with sensing materials of carbon nanotubes investigated with surface acoustic waves [14,15].…”

Section: Introductionsupporting

confidence: 52%

TiO2–SiO2 sol–gel hybrid films and their sensitivity to gaseous toluene

Zaharescu

Barau

Predoană

et al. 2008

Journal of Non-Crystalline Solids

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Section: Introductionsupporting

confidence: 52%

TiO2–SiO2 sol–gel hybrid films and their sensitivity to gaseous toluene

Zaharescu

Barau

Predoană

et al. 2008

Journal of Non-Crystalline Solids

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“…Various methods such as drop casting, [135][136][137][138] spin coating, [139,140] inkjet printing, [133] spray coating, [141,142] capillary painting, [143] plasma polymerization, [144] in situ polymerization, [145][146][147][148] grafting to via SAM functionalization, [149] and matrix assisted pulsed laser evaporation (MAPLE) [150] have been adapted for modifying MCs.…”

Section: Polymer Layersmentioning

confidence: 99%

Bimaterial Microcantilevers as a Hybrid Sensing Platform

et al. 2008

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Microcantilevers, one of the most common MEMS structures, have been introduced as a novel sensing paradigm nearly a decade ago. Ever since, the technology has emerged to find important applications in chemical, biological and physical sensing areas. Today the technology stands at the verge of providing the next generation of sophisticated sensors (such as artificial nose, artificial tongue) with extremely high sensitivity and miniature size. The article provides an overview of the modes of detection, theory behind the transduction mechanisms, materials employed as active layers, and some of the important applications. Emphasizing the material design aspects, the review underscores the most important findings, current trends, key challenges and future directions of the microcantilever based sensor technology.

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“…For measurements in gaseous environment, a sensor application in dynamic mode of piezoelectric cantilevers for an ultrasensitive nanobalance is reported [91]. Micromolded plastic microcantilevers are proposed for chemical sensing [92], as well as micromachined silicon microcantilevers for gas sensing based on capacitive read-out [93]. In chemical sensing, ligandfunctionalized microcantilevers for characterization of metal ion sensing are presented [94], and an array of flexible microcantilever beams is used to observe the action of rotaxane based artificial molecular muscles [95].…”

Section: Recent Literature and Outlookmentioning

confidence: 99%

Microcantilever Sensors

Lang¹,

Gerber²

2008

Topics in Current Chemistry

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Microfabricated cantilevers have been used in atomic force microscopy for the topography imagingof non-conductive surfaces for more than 20 years. Cantilever beams without tips have proved theirapplicability in recent years as miniaturized, ultrasensitive, and fast-responding sensors for applicationsin chemistry, physics, biochemistry, and medicine. Microcantilever sensors respond by bending dueto the absorption of molecules. A shift in resonance frequency also occurs. They can be operatedin different environments such as gaseous environment, liquids, or vacuum. In gas, microcantileversensors can be operated as an artificial nose, whereby the bending pattern of a microfabricatedarray of eight polymer-coated silicon cantilevers is characteristic of the different vapors from solvents,flavors, and beverages. When operated in a liquid, microcantilever sensors are able to detectbiochemical reactions. Each cantilever is functionalized with a specific biochemical probe receptor,sensitive for detection of the corresponding target molecule. Applications lie in the fields of label-and amplification-free detection of DNA hybridization, the detection of proteins as well as antigen-antibodyreactions, and the detection of larger entities, such as bacteria and fungi.

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Micromachined silicon microcantilevers for gas sensing applications with capacitive read-out

Cited by 40 publications

References 6 publications

TiO2–SiO2 sol–gel hybrid films and their sensitivity to gaseous toluene

TiO2–SiO2 sol–gel hybrid films and their sensitivity to gaseous toluene

Bimaterial Microcantilevers as a Hybrid Sensing Platform

Microcantilever Sensors

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