Micro-heat engines, gas turbines, and rocket engines - The MIT microengine project

Epstein, A. H.; Senturia, S.D.; Al-Midani, Omar M.; Anathasuresh, G.; Ayón, Arturo A.; Breuer, Kenneth S.; Chen, Kuo-Shen; Ehrich, F. F.; Esteve, E. M.; Fréchette, Luc; Gauba, G.; Ghodssi, Reza; Groshenry, C.; Jacobson, S. A.; Kerrebrock, Jack L.; Lang, Jeffrey H.; Lin, Chuang-Chia; London, Adam; Lopata, Jacob; Mehra, A.; Miranda, J. O.Mur; Nagle, Steven F.; Orr, D. J.; Piekos, Edward S.; Schmidt, Martin; Shirley, G.; Spearing, S.M.; Tan, C. S.; Tzeng, Yang-Sheng; Waitz, L. A.

doi:10.2514/6.1997-1773

Cited by 163 publications

(81 citation statements)

References 6 publications

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“…In order to achieve useful power levels, these machines require characteristic dimensions in the range from 0.1 to 10 mm. Examples under development at MIT include micro gas turbine engines, micro motor compressor, micro rocket engines [8], and micro solid-state hydraulic transducers [9]. The success of these power MEMS relies on achieving high mechanical strengths and the capability of controlling local stress levels.…”

mentioning

confidence: 99%

Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE)

Chen

Ayón

Zhang

et al. 2002

J. Microelectromech. Syst.

211

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Abstract-The ability to predict and control the influence of process parameters during silicon etching is vital for the success of most MEMS devices. In the case of deep reactive ion etching (DRIE) of silicon substrates, experimental results indicate that etch performance as well as surface morphology and post-etch mechanical behavior have a strong dependence on processing parameters. In order to understand the influence of these parameters, a set of experiments was designed and performed to fully characterize the sensitivity of surface morphology and mechanical behavior of silicon samples produced with different DRIE operating conditions. The designed experiment involved a matrix of 55 silicon wafers with radiused hub flexure (RHF) specimens which were etched 10 min under varying DRIE processing conditions. Data collected by interferometry, atomic force microscopy (AFM), profilometry, and scanning electron microscopy (SEM), was used to determine the response of etching performance to operating conditions. The data collected for fracture strength was analyzed and modeled by finite element computation. The data was then fitted to response surfaces to model the dependence of response variables on dry processing conditions. The results showed that the achievable anisotropy, etching uniformity, fillet radii, and surface roughness had a strong dependence on chamber pressure, applied coil and electrode power, and reactant gases flow rate. The observed post-etching mechanical behavior for specimens with high surface roughness always indicated low fracture strength. For specimens with better surface quality, there was a wider distribution in sample strength. This suggests that there are more controlling factors influencing the mechanical behavior of specimens. Nevertheless, it showed that in order to achieve high strength, fine surface quality is a necessary requisite. The mapping of the dependence of response variables on dry processing conditions produced by this systematic approach provides additional insight into the plasma phenomena involved and supplies a practical set of tools to locate and optimize robust operating conditions.[684]Index Terms-Deep reactive ion etching (DRIE), fracture strength, MEMS, plasma etching, silicon, surface morphology.

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mentioning

confidence: 99%

Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE)

Chen

Ayón

Zhang

et al. 2002

J. Microelectromech. Syst.

211

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“…In this device, torque delivered by the turbine simply counteracts the viscous friction on the rotor, since the objective is to experimentally develop the turbine and air bearings. A load could be integrated with the rotor, such as an electric generator, a compressor, or a pump, as proposed by Epstein et al [7]. The following sections describe the design and operating principles of the main components.…”

Section: A Overall Configurationmentioning

confidence: 99%

“…For this application, the turbine must only provide enough power to overcome the viscous drag on the rotor, typically induced in the bearings. To simulate the load encountered in a complete energy conversion system, such as that from an electric generator that would be integrated with the rotor for electric power generation [7], the viscous drag was increased by reducing the clearance over the backside of the rotor. For the current configuration, the total viscous power is approximately 13 W at a circumferential tip speed of 500 m/s and is proportional to the square of the rotation rate.…”

Section: B Microturbinementioning

confidence: 99%

“…An on-going effort at the Massachusetts Institute of Technology aims to develop microscale high-speed rotating machinery and microheat engine technology using silicon micromachining and other MEMS fabrication processes [7]. It was proposed that lithographic patterning, deep-reactive ion etching (DRIE), and wafer bonding could be used to fabricate integrated single-crystal silicon or refractory ceramic micro energy conversion systems with high power densities.…”

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confidence: 99%

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High-speed microfabricated silicon turbomachinery and fluid film bearings

Fréchette

Jacobson

Breuer

et al. 2005

J. Microelectromech. Syst.

129

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Abstract-A single-crystal silicon micromachined air turbine supported on gas-lubricated bearings has been operated in a controlled and sustained manner at rotational speeds greater than 1 million revolutions per minute, with mechanical power levels approaching 5 W. The device is formed from a fusion bonded stack of five silicon wafers individually patterned on both sides using deep reactive ion etching (DRIE). It consists of a single stage radial inflow turbine on a 4.2-mm diameter rotor that is supported on externally pressurized hydrostatic journal and thrust bearings. This paper presents the design, fabrication, and testing of the first microfabricated rotors to operate at circumferential tip speeds up to 300 m/s, on the order of conventional high performance turbomachinery. Successful operation of this device motivates the use of silicon micromachined high-speed rotating machinery for power microelectromechanical systems (MEMS) applications such as portable energy conversion, micropropulsion, and microfluidic pumping and cooling.[1161]

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“…This paper discussion is based on the researches at home and abroad [10]- [15], design a round Button Turbojet Engine (BTE), and do some numerical simulations for the combustion chamber. Therefore, not only we got the combustion efficiency factors, characteristic curve and total pressure recovery coefficient, but also obtained the distribution of temperature, velocity and component concentration about the internal combustion chamber.…”

Section: Introductionmentioning

confidence: 99%

Numerical Simulation of Combustion Chamber for Button Turbojet Engine

Fang

Gao

et al. 2016

MATEC Web Conf.

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Abstract. To provide reference data for ultra-micro combustor, a new type button turbojet engine was designed and simulated the combustion's steady-state process. The boundary condition of inlet was calculated using isentropic numerical calculation, taken into turbulent chemical reaction, heat radiation, and so on, getting the combustion chamber's steady-state of the velocity, temperature and component concentration distribution, analysis the fuel/air flow and backflow, combustion efficiency and total pressure recovery coefficient, and compared with the experimental data. The calculation results can accurately reflect the actual combustion. The results show that combustion chamber exit velocity is about 65m/s, outlet temperature is around 1000K, the simulation and experimental data are similar, combustion chamber structure design is reasonable, and this paper will provide a basis for the future improvement of the millimeter scale turbojet engine.

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Micro-heat engines, gas turbines, and rocket engines - The MIT microengine project

Cited by 163 publications

References 6 publications

Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE)

Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE)

High-speed microfabricated silicon turbomachinery and fluid film bearings

Numerical Simulation of Combustion Chamber for Button Turbojet Engine

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