Micro‐Nano Processing of Active Layers in Flexible Tactile Sensors via Template Methods: A Review

Niu, Hongsen; Zhang, Huiyun; Yue, Wenjing; Gao, Song; Kan, Hao; Zhang, Chunwei; Zhang, Congcong; Pang, Jinbo; Lou, Zheng; Wang, Lili; Li, Yang; Liu, Hong; Shen, Guozhen

doi:10.1002/smll.202100804

Cited by 100 publications

(74 citation statements)

References 203 publications

(308 reference statements)

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“…However, because the template technique's processing and relevant circumstances have yet to be perfected, the development and commercialization of flexible tactile sensors based on the template approach are still in the early stages. Despite the aforementioned challenges, breakthroughs in microelectronics, materials science, nanoscience, and other fields have set the groundwork for a variety of template approaches, allowing for the further development of flexible tactile sensors [40].…”

Section: Materials Requirement Of Wearable Sensing Apparatusesmentioning

confidence: 99%

Revolution in Flexible Wearable Electronics for Temperature and Pressure Monitoring—A Review

2022

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In the last few decades, technology innovation has had a huge influence on our lives and well-being. Various factors of observing our physiological characteristics are taken into account. Wearable sensing tools are one of the most imperative sectors that are now trending and are expected to grow significantly in the coming days. Externally utilized tools connected to any human to assess physiological characteristics of interest are known as wearable sensors. Wearable sensors range in size from tiny to large tools that are physically affixed to the user and operate on wired or wireless terms. With increasing technological capabilities and a greater grasp of current research procedures, the usage of wearable sensors has a brighter future. In this review paper, the recent developments of two important types of wearable electronics apparatuses have been discussed for temperature and pressure sensing (Psensing) applications. Temperature sensing (Tsensing) is one of the most important physiological factors for determining human body temperature, with a focus on patients with long-term chronic conditions, normally healthy, unconscious, and injured patients receiving surgical treatment, as well as the health of medical personnel. Flexile Psensing devices are classified into three categories established on their transduction mechanisms: piezoresistive, capacitive, and piezoelectric. Many efforts have been made to enhance the characteristics of the flexible Psensing devices established on these mechanisms.

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Section: Materials Requirement Of Wearable Sensing Apparatusesmentioning

confidence: 99%

Revolution in Flexible Wearable Electronics for Temperature and Pressure Monitoring—A Review

2022

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“…Liu et al and Kumar et al focused on sensors fabricated using 3D printing [ 21 , 22 ]. Other examples of recent review papers evaluated robotics applications [ 23 ], graphene-based sensors [ 24 , 25 ], micro- and nano-processing [ 26 ], and MEMS-based flow sensors [ 27 ].…”

Section: Introductionmentioning

confidence: 99%

“…Researchers used principles to transduce measured physical quantities into electronic signals. The commonly used transduction mechanisms are piezoresistive, capacitive, and piezoelectric [ 21 , 24 , 26 ]. Other tactile sensors used methods such as triboelectric and optical.…”

Section: Introductionmentioning

confidence: 99%

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Review of Recent Bio-Inspired Design and Manufacturing of Whisker Tactile Sensors

Sayegh

Daraghma

Mekid

et al. 2022

Sensors

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Whisker sensors are a class of tactile sensors that have recently attracted attention. Inspired by mammals’ whiskers known as mystacial vibrissae, they have displayed tremendous potential in a variety of applications e.g., robotics, underwater vehicles, minimally invasive surgeries, and leak detection. This paper provides a supplement to the recent tactile sensing techniques’ designs of whiskers that only sense at their base, as well as the materials employed, and manufacturing techniques. The article delves into the technical specifications of these sensors, such as the resolution, measurement range, sensitivity, durability, and recovery time, which determine their performance. The sensors’ sensitivity varies depending on the measured physical quantity; for example, the pressure sensors had an intermediate sensitivity of 58%/Pa and a response time of around 90 ms, whereas the force sensors that function based on piezoelectric effects exhibited good linearity in the measurements with a resolution of 3 µN and sensitivity of 0.1682 mV/µN. Some sensors were used to perform spatial mapping and the identification of the geometry and roughness of objects with a reported resolution of 25 nm. The durability and recovery time showed a wide range of values, with the maximum durability being 10,000 cycles and the shortest recovery time being 5 ms. Furthermore, the paper examines the fabrication of whiskers at the micro- and nanoscales, as well as their contributions to mechanical and thermal behavior. The commonly used manufacturing techniques of 3D printing, PDMS casting, and screen printing were used in addition to several micro and nanofabrication techniques such as photolithography, etching, and chemical vapor deposition. Lastly, the paper discusses the main potential applications of these sensors and potential research gaps in this field. In particular, the operation of whisker sensors under high temperatures or high pressure requires further investigation, as does the design of sensors to explore larger topologies.

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“…In addition, many articles introduce the interface microstructures of the device only from the perspective of materials and micro-nano-processing technology. However, the impact of microstructures on the performance of the flexible sensor from the perspective of the force-sensitive interface is not discussed [ 36 , 37 ]. In this way, it is essential to explore the influence of the microstructures of the force-sensitive interface and the device structure design on the performance of the flexible pressure sensor from the perspective of the device’s force-sensitive interface.…”

Section: Introductionmentioning

confidence: 99%

Force-Sensitive Interface Engineering in Flexible Pressure Sensors: A Review

Tai

Wei

et al. 2022

Sensors

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Flexible pressure sensors have received extensive attention in recent years due to their great importance in intelligent electronic devices. In order to improve the sensing performance of flexible pressure sensors, researchers are committed to making improvements in device materials, force-sensitive interfaces, and device structures. This paper focuses on the force-sensitive interface engineering of the device, which listing the main preparation methods of various force-sensitive interface microstructures and describing their respective advantages and disadvantages from the working mechanisms and practical applications of the flexible pressure sensor. What is more, the device structures of the flexible pressure sensor are investigated with the regular and irregular force-sensitive interface and accordingly the influences of different device structures on the performance are discussed. Finally, we not only summarize diverse practical applications of the existing flexible pressure sensors controlled by the force-sensitive interface but also briefly discuss some existing problems and future prospects of how to improve the device performance through the adjustment of the force-sensitive interface.

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Micro‐Nano Processing of Active Layers in Flexible Tactile Sensors via Template Methods: A Review

Cited by 100 publications

References 203 publications

Revolution in Flexible Wearable Electronics for Temperature and Pressure Monitoring—A Review

Revolution in Flexible Wearable Electronics for Temperature and Pressure Monitoring—A Review

Review of Recent Bio-Inspired Design and Manufacturing of Whisker Tactile Sensors

Force-Sensitive Interface Engineering in Flexible Pressure Sensors: A Review

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