Micro Piezoelectric Ultrasonic Motors

Uchino, Kenji; Cagatay, Serra; Koç, Burhanettin; Dong, Shuxiang; Bouchilloux, Philippe; Strauss, M.

doi:10.1007/s10832-004-5131-x

Cited by 85 publications

(37 citation statements)

References 8 publications

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“…In contrast, heat engines operate with efficiencies of less than 60%, and generally the efficiency decreases as the size of the engine decreases due to higher thermal losses. Large electric motors achieve efficiencies of close to 100%, but the efficiency drops to below 20% for electric micromotors (30). Efforts to exploit phase transitions in polymer gels for force generation scalable to the molecular scale achieved an efficiency on the order of 10 −6 (31).…”

Section: Efficiencymentioning

confidence: 99%

Engineering Applications of Biomolecular Motors

Hess

2011

Annu. Rev. Biomed. Eng.

128

112

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Biomolecular motors, in particular motor proteins from the kinesin and myosin families, can be used to explore engineering applications of molecular motors in general. Their outstanding performance enables the experimental study of hybrid systems, where bio-inspired functions such as sensing, actuation, and transport rely on the nanoscale generation of mechanical force. Scaling laws and theoretical studies demonstrate the optimality of biomolecular motor designs and inform the development of synthetic molecular motors.

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Section: Efficiencymentioning

confidence: 99%

Engineering Applications of Biomolecular Motors

Hess

2011

Annu. Rev. Biomed. Eng.

128

112

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“…Additionally, the adoption of advanced controllers, such as sliding mode control, fuzzy theory-based control, and adaptive control, requires many adjustable elements as well as an exact mathematical model. [6][7][8][9][10][11][12][13][14] Ultrasonic motors based on a friction force drive have been applied to these controllers, as an ultrasonic actuator has numerous advantages. These include high driving force, high holding force without any power supply, high precision, low magnetic noise, vacuum compatibility, rapid response, compact mechanism, and silent operation.…”

Section: Introductionmentioning

confidence: 99%

Ultraprecision XY stage using a hybrid bolt-clamped Langevin-type ultrasonic linear motor for continuous motion

Lee

2015

Review of Scientific Instruments

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This paper presents a design and control system for an XY stage driven by an ultrasonic linear motor. In this study, a hybrid bolt-clamped Langevin-type ultrasonic linear motor was manufactured and then operated at the resonance frequency of the third longitudinal and the sixth lateral modes. These two modes were matched through the preload adjustment and precisely tuned by the frequency matching method based on the impedance matching method with consideration of the different moving weights. The XY stage was evaluated in terms of position and circular motion. To achieve both fine and stable motion, the controller consisted of a nominal characteristics trajectory following (NCTF) control for continuous motion, dead zone compensation, and a switching controller based on the different NCTFs for the macro- and micro-dynamics regimes. The experimental results showed that the developed stage enables positioning and continuous motion with nanometer-level accuracy.

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“…Piezoelectric motors have been exploited mainly in low power applications [3,4], including high accuracy positioning, manufacturing process control, pick-and-place assembly, camera autofocus. Anyway USMs can be exploited also in applications where there is the need for motors able to provide high torque but employed at very low duty cycle [5].…”

Section: Introductionmentioning

confidence: 99%