Micro Powder Injection Molding

Piotter, V.; Benzler, Tobias; Gietzelt, Thomas; Ruprecht, R.; Haußelt, J.

doi:10.1002/1527-2648(200010)2:10<639::aid-adem639>3.0.co;2-a

Cited by 53 publications

(43 citation statements)

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“…Minimum part weight of μPIM components is decreasing with more miniaturisation achieved with μPIM. Reported part weight of μPIM components was as small as 0.25 mg for LIGA-replicated gear wheels made of aluminium oxide [18]. For metals components, parts with weights of 7 mg were made by μPIM of 17-4PH, and parts for human ear-bone replacement had the weight of 5.4 mg [1].…”

Section: Mouldable Dimensions and Achievable Aspect Ratiosmentioning

confidence: 99%

“… Replication accuracy: Particle size distribution has a significant influence on the accuracy of the replicated structures [87]. Recommended ranges for µPIM are 1-5 µm for metals and 0.5 or less for ceramics [7,35,40,46].…”

Section: Powder Loading and Particle Sizementioning

confidence: 99%

“… Surface finish: Smaller powder sizes produce micro-structures with lower roughness values (a detailed discussion about surface properties in µPIM components is in Section 7) [40,46,88].…”

Section: Powder Loading and Particle Sizementioning

confidence: 99%

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A review of micro-powder injection moulding as a microfabrication technique

Attia

Alcock

2011

J. Micromech. Microeng.

114

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Micro-powder injection moulding (μPIM) is a fast-developing micro-manufacturing technique for the production of metal and ceramic components. Shape complexity, dimensional accuracy, replication fidelity, material variety combined with high-volume capabilities are some of the key advantages of the technology. This paper assesses the capabilities and limitations of μPIM as a micromanufacturing technique by reviewing the latest developments in the area and by considering potential improvements. The basic elements of the process chain, variant processes and simulation attempts are discussed and evaluated. Challenges and research gaps are highlighted, and potential areas for improvement are presented.

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Section: Mouldable Dimensions and Achievable Aspect Ratiosmentioning

confidence: 99%

Section: Powder Loading and Particle Sizementioning

confidence: 99%

See 1 more Smart Citation

A review of micro-powder injection moulding as a microfabrication technique

Attia

Alcock

2011

J. Micromech. Microeng.

114

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“…For academic research environments, injection molding is also limited by the cost of the equipment and the high pressures required (e.g., 3–5 MPa). [10]…”

Section: Fabricating Microfluidic Channelsmentioning

confidence: 99%

Cofabrication: A Strategy for Building Multicomponent Microsystems

et al. 2010

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ConspectusWhitesides Conspectus ar-2009-00178k.R2 edited and approvedIn this Account, we describe a strategy for fabricating multicomponent microsystems in which the structures of essentially all of the components are formed in a single step of micromolding. This strategy-which we call "co-fabrication"-is an alternative to multilayer microfabrication, in which multiple layers of components are sequentially aligned ("registered") and deposited on a substrate by photolithography.Co-fabrication has several characteristics that make it a particularly useful approach for building multicomponent microsystems. It rapidly and inexpensively generates correctly aligned components (for example, wires, heaters, magnetic field generators, optical waveguides, and microfluidic channels)-and over very large surface areas. By avoiding registration, the technique does not impose the size limitations of common registration tools, such as steppers and contact aligners, on substrates. We have demonstrated multicomponent microsystems with surface areas exceeding 100 cm 2 , but in principle device size is only limited by the requirements of generating the original master.Co-fabrication can also serve as a low-cost and minimal-equipment strategy for building microsystems. The technique is amenable to a variety of laboratory settings and uses fabrication tools that are less expensive than those used for multistep microfabrication. The process also requires only small amounts of solvent and photoresist-a costly chemical required for photolithography. In co-fabrication, photoresist is applied and developed only once to produce a master, which is then used to produce multiple copies of molds containing the microfluidic channels.Co-fabrication represents a new processing paradigm in which the exterior (or shell) of the desired structures are produced before the interior (or core). This approach-generating the insulation or packaging structure first, and injecting materials that provide function in channels in liquid phase -makes it possible to design and build microsystems with component materials that cannot be easily manipulated conventionally (such as solid materials with low melting points, liquid metals, liquid crystals, fused salts, foams, emulsions, gases, polymers, biomaterials, and fragile organics). Moreover, materials can be altered, removed, or replaced after the manufacturing stage. For example, co-fabrication allows one to build devices in which a liquid flows through the device during use (or is replaced before use). Metal wires can be melted and re-set by heating (in principle, repairing a break). This method leads to certain kinds of structures-such as integrated *gwhitesides@gmwgroup.harvard.edu. This Account outlines the strategy of co-fabrication, describing several co-fabricated microsystems that combine microfluidics with (i) electrical wires for microheaters, electromagnets, and organic electrodes; (ii) fluidic optical components, such as optical waveguides, lenses, and light sources; (iii) gels for biological cell cu...

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“…Since it is a batch process, micro-molding has the potential to be low cost, as long as the cost of the molds is not excessive. Previous work has focused on either powder injection molding [1][2][3][4] , a more complicated process, or on filling molds made by deep x-ray lithography (DXRL) 5 , the same process used to make molds for LIGA, which were therefore relatively expensive due to the cost of synchrotron exposure. In the present work, LIGA was used to make the master from which the molds are made so that precise dimensional tolerance, straight sidewalls and high aspect ratio parts can be produced without the expense of DXRL.…”

Section: Introductionmentioning

confidence: 99%

The Fabrication of Stainless Steel Parts for MEMs

et al. 2001

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A micro-molding process was used to fabricate parts in the 0.1 to 10 mm size range from a stainless steel nano-powder. The two types of molds used were both produced from parts fabricated using the LIGA process so that they had precise dimensional tolerance and straight sidewalls. Rigid PMMA molds were made by injection molding and flexible silicone rubber molds were made by casting. Mold filling was accomplished by mixing the powder with epoxy to form a putty-like material that was then pressed into the mold cavities and allowed to cure. After pyrolysis of the epoxy, the parts were sintered in forming gas. The densification kinetics were measured in situ using a video system. Full densification was achieved after 1 hour at 1350°. The microstructure of the sintered parts was examined using the SEM. The mechanical strength, hardness, dimensional tolerance and surface roughness of the sintered parts were also measured.

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Micro Powder Injection Molding

Cited by 53 publications

References 0 publications

A review of micro-powder injection moulding as a microfabrication technique

A review of micro-powder injection moulding as a microfabrication technique

Cofabrication: A Strategy for Building Multicomponent Microsystems

The Fabrication of Stainless Steel Parts for MEMs

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