Microactuated micro-XYZ stages for free-space micro-optical bench

Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond pulse-shaping in phase and amplitude

“…The two types of actuators are tilt (c) and piston (d), connected via a height adapter (b) to the X -shaped springs (a) lying at the outer edges. Both degrees of freedom are enacted using a single spring: vertical comb drives 19,20 are used in a symmetric way for out-of-plane piston movement and in an asymmetric manner for enacting the torque for tilting.…”

Micromachining for optical and optoelectronic systems

“…The SEM micrograph of such a threedimensional optical beam-steering device is shown in Fig. 21 [69]. Two-dimensional positioning of the optical beams as well as focusing/defocusing of an optical beam emitted from a single-mode fiber have been experimentally demonstrated, as shown in Fig.…”

“…By combining two 45 mirrors in orthogonal directions, as shown in Fig. 20(b), two-dimensional optical beam steering can be achieved [69]. By moving the lower 45 mirror, the optical beam is shifted in the horizontal direction.…”

The Microassembly Technique for a 3D Single Crystalline Silicon Structure Using a Polyimide/Chromium Cantilever

“…Therefore it can be realized multiaxis sensors which have uniform axial characteristics by assembling of uni-axis sensors. Although the microassembly techniques on the wafer have been already proposed such as the reshaping technnique of polysilicon structure [4] and the assembly technique using polysilicon hinge [5], these structures are assembled one by one.…”