“…The nanostructure parameter K, which can be deduced from FTIR analysis, is defined as the number of hydrogen atoms in the volume of a missing Si atom and indicates the dominant type of hydrogenated vacancy [7,9]. In this work it is shown that the S parameter correlates strongly with the found nanostructure parameter K. The dominant type of open volume deficiency in device grade a-Si:H seems to be the divacancy, which is in line with earlier observations from positron annihilation lifetime spectroscopy (PALS) [4], DB-PAS [3,5] and FTIR [9] studies. This result further underlines the important role of hydrogenated divacancies in a-Si:H, which has recently been illustrated in detail [9].…”