Microfabrication by use of a spatial light modulator in the ultraviolet:?experimental results

Abstract

We report the development of a new microstereophotolithography technique for creation of three-dimensional microcomponents by use of a planar, layer-by-layer process of exposure, in which a spatial light modulator is used as a dynamic lithographic mask. The system operates in the UV to take advantage of the wide supply of commercially available photopolymers designed for conventional stereolithography. With this novel procedure it is possible to build components with feature sizes as small as a few micrometers. The experimental setup is briefly described, and the first microcomponent fabricated by this system is shown.

Microstereolithography

“…This special LCD component (a polysilicon thinfilm twisted nematic LCD) was not damaged by wavelengths above 350 nm, and was irradiated with an argon-ion laser operating at 351.1 nm [33,34]. This special LCD component (a polysilicon thinfilm twisted nematic LCD) was not damaged by wavelengths above 350 nm, and was irradiated with an argon-ion laser operating at 351.1 nm [33,34].…”

“…Typically, such components include pipes [15,48], springs [15,49], conical and pyramidal structures [22], microgears [19,31,34,61], freely movable structures [61], and scaled-down models [11]. In many cases, the fabrication of various components was an actual part of the process development phase as it allowed to identify specific problems in the design of the machines and in the formulation of the resins.…”

Multiscale 3D manufacturing: combining thermal extrusion printing with additive and subtractive direct laser writing

“…14, 15 A possible alternative application of DLW is as a precise 3D additive manufacturing (AM) tool. Originally evolving from microstereolithography 16,17 once upgraded with ultrafast laser 18 it became one of the most precise lithographic tools. 19 It combines both the 3D capability 20 and nanoscale resolution.…”

Single-pulse multiphoton polymerization of complex structures using a digital multimirror device

“…DMD-based MPP generally has the advantage over other spatial-light-modulator based approaches [18], in both cost and electronic switching speed. Here, we continue the progress shown by Li et.…”