2002
DOI: 10.1117/12.457847
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Micromachined deformable mirrors for adaptive optics

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Cited by 42 publications
(21 citation statements)
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“…Many deformable mirrors technologies such as mechanical mirrors with piezoelectric actuators, liquid crystal spatial light modulators, micro-electro-mechanical-system (MEMS) deformable mirrors, etc. [6][7][8][9] have been investigated for active phase compensation. Mechanical DMs are typically bulky and expensive, and not scalable to large number of actuators.…”
Section: Introductionmentioning
confidence: 99%
“…Many deformable mirrors technologies such as mechanical mirrors with piezoelectric actuators, liquid crystal spatial light modulators, micro-electro-mechanical-system (MEMS) deformable mirrors, etc. [6][7][8][9] have been investigated for active phase compensation. Mechanical DMs are typically bulky and expensive, and not scalable to large number of actuators.…”
Section: Introductionmentioning
confidence: 99%
“…We next demonstrate the wavefront correcting capabilities of the deformable mirror. The μDM100 DM from Boston Micromachines with 100 electrostatic actuators, a 3.3mm round aperture, and 2μm stroke was chosen for this design [20]. Instead of modeling all 100 actuators, we created a user defined surface in ZEMAX consisting of a set of 43 evenly spaced Gaussian basis functions to represent the mirror surface shape.…”
Section: Specifications and Predicted Performancementioning
confidence: 99%
“…The use of adaptive optics (AO) in the scanning laser ophthalmoscope [3][4][5][6][7][8][9][10][11][12][13][14][15][16] to correct ocular aberrations has further increased the imaging quality by reducing the wavefront errors in the optical paths. In an AO SLO, the ocular aberrations of the test subjects are measured by a wavefront sensor.…”
Section: Introductionmentioning
confidence: 99%