2002
DOI: 10.1016/s0924-4247(01)00901-3
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Micromachining of a silicon multichannel microprobe for neural electrical activity recording

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Cited by 11 publications
(9 citation statements)
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“…Compatibility with other standard microelectronic device fabrication processes allows for future integration of signal processing circuitry along with the microelectrode on the same substrate that will result in better signal conditioning at the head-stage of the animal. One of the main distinctions of this approach compared with the earlier approaches involving bulk micromachining (Najafi et al, 1985(Najafi et al, , 1990Eichenbaum and Kuperstein, 1986;Najafi and Wise, 1986;Normann et al, 1988;Kewley et al, 1997;Yoon et al, 2000;Moldovan et al, 2002) of silicon is the choice of materials (and accompanying processes) for the layout of conductors and recording sites. Earlier approaches needed several masks to pattern lines of conductors, dielectrics, and recording sites, respectively.…”
Section: Discussionmentioning
confidence: 99%
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“…Compatibility with other standard microelectronic device fabrication processes allows for future integration of signal processing circuitry along with the microelectrode on the same substrate that will result in better signal conditioning at the head-stage of the animal. One of the main distinctions of this approach compared with the earlier approaches involving bulk micromachining (Najafi et al, 1985(Najafi et al, , 1990Eichenbaum and Kuperstein, 1986;Najafi and Wise, 1986;Normann et al, 1988;Kewley et al, 1997;Yoon et al, 2000;Moldovan et al, 2002) of silicon is the choice of materials (and accompanying processes) for the layout of conductors and recording sites. Earlier approaches needed several masks to pattern lines of conductors, dielectrics, and recording sites, respectively.…”
Section: Discussionmentioning
confidence: 99%
“…Micro-electromechanical systems (MEMS) technology is increasingly being used for developing neuronal microelectrode arrays for recording and stimulation (Wise et al, 1970;Najafi et al, 1985Najafi et al, , 1990Eichenbaum and Kuperstein, 1986;Najafi and Wise, 1986;Normann et al, 1988;Blum et al, 1991;Boppart et al, 1992;Carter and Houk, 1993;Rutten et al, 1995Rutten et al, , 1999Nordhausen et al, 1996;Kewley et al, 1997;Maynard et al, 1997;Yee et al, 1999;Bai et al, 2000;Burmeister et al, 2000;Yoon et al, 2000;Rousche et al, 2001;Moldovan et al, 2002;Norlin et al, 2002;Xu et al, 2002). One of the desired features of this technology is the fact that it offers the potential of integrating signal processing circuitry and other electronics on the microelectrode (Takahashi and Matsuo, 1984;Najafi et al, 1985;Najafi and Wise, 1986).…”
Section: Introductionmentioning
confidence: 99%
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“…A great variety of microelectrodes have been designed, fabricated, and used to perform stimulation during the past decade. The references (Wise and Angell 1975;Wise et al 2004;Kipke et al 2003;Snow et al 2006;Moldovan et al 2002) provided typical multishank silicon micromachined neural microelectrodes. These microelectrodes have a highdensity 3D probe array and are strong enough to penetrate into the cerebral cortex and tissue to stimulate or record signals.…”
Section: Introductionmentioning
confidence: 99%
“…(5)(6)(7) During the past decade, many and perhaps most types of implanted microelectrode structures and fabrication processes have been studied. (5)(6)(7)(8)(9)(10)(11)(12)(13)(14)(15)(16)(17)(18)(19)(20) Regarding the deep-brain microelectrode for long-term recording/stimulation, all the materials used to make the microelectrode must be biocompatible, and Pt and Pt 90 Ir 10 alloy are the best materials for microelectrode films and microwires, respectively, because of their good biocompatibility and corrosion resistance and also because of the charge injection capacity of Pt and low impedance and good mechanical property of Pt 90 Ir 10 alloy. (5,21) As for the microelectrode, whether telemetry is used or not in the electrode system, communication between the implanted microelectrode and the outside stimulator must be carried out through a multichannel of interconnected microwires and a percutaneous connector.…”
Section: Introductionmentioning
confidence: 99%