“…Micro-electromechanical systems (MEMS) technology is increasingly being used for developing neuronal microelectrode arrays for recording and stimulation (Wise et al, 1970;Najafi et al, 1985Najafi et al, , 1990Eichenbaum and Kuperstein, 1986;Najafi and Wise, 1986;Normann et al, 1988;Blum et al, 1991;Boppart et al, 1992;Carter and Houk, 1993;Rutten et al, 1995Rutten et al, , 1999Nordhausen et al, 1996;Kewley et al, 1997;Maynard et al, 1997;Yee et al, 1999;Bai et al, 2000;Burmeister et al, 2000;Yoon et al, 2000;Rousche et al, 2001;Moldovan et al, 2002;Norlin et al, 2002;Xu et al, 2002). One of the desired features of this technology is the fact that it offers the potential of integrating signal processing circuitry and other electronics on the microelectrode (Takahashi and Matsuo, 1984;Najafi et al, 1985;Najafi and Wise, 1986).…”