Micromask Lithography for Cheap and Fast 2D Materials Microstructures Fabrication

Abstract

The fast and precise fabrication of micro-devices based on single flakes of novel 2D materials and stacked heterostructures is vital for exploration of novel functionalities. In this paper, we demonstrate a fast high-resolution contact mask lithography through a simple upgrade of metallographic optical microscope. Suggested kit for the micromask lithography is compact and easily compatible with a glove box, thus being suitable for a wide range of air-unstable materials. The shadow masks could be either ordered commercially or fabricated in a laboratory using a beam lithography. The processes of the mask alignment and the resist exposure take a few minutes and provide a micrometer resolution. With the total price of the kit components around USD 200, our approach would be convenient for laboratories with the limited access to commercial lithographic systems.

3D Hypersound Microscopy of van der Waals Heterostructures

“…24 The thickness of the flakes was determined using the atomic force microscopy. van der Waals heterostructures out of these flakes were then assembled on the Al 2 O 3 substrate with a preliminary lithographically defined 25 array of binary markers. We used a dry hot pick up technique 26 with a homemade transfer machine 27 at ambient conditions.…”

Wearable chemical sensors based on 2D materials for healthcare applications

“…94 Poor quality photomasks, focus, or alignment can result in distorted patterns or defects. 95 Photolithography has also been widely implemented in the creation of 2D devices. 96 Using simple top-down approaches, Zhao et al 96 demonstrated wafer-scale nanoribbon field-effect transistor (FET) biosensors (Fig.…”

A Review on Low-Dimensional Nanomaterials: Nanofabrication, Characterization and Applications

“…It can be mitigated by using a thinner photoresist to improve image contrast [ 56 ]. Recently, Pugachev et al demonstrated the feasibility of manufacturing low-cost micro masks using contact lithographic methods, allowing for the straightforward scaling up of 2D materials microstructure fabrication [ 57 ]. The constructed micro mask can achieve resolutions on the order of micrometers (~0.6 μm).…”