“…Moreover, they can also be used soon as a semiconductor material with a wide-band gap, which is very useful for some power devices. − Thus, SiC and diamond are promising materials in the precision machining and electrical industries. The surface treatment of these materials, such as chemical modification in-area and in-depth and/or nano- and micro-level etching, will be very important for developing in micro-machines and micro-devices. ,− In general, chemical modifications such as etching and oxide formation have been done by laser beam ablation and/or thermal oxidation at high temperature. ,,, On the other hand, polishing these materials has been done with some fine particles such as diamond that have excellent hardness. ,, However, the surface treatments of SiC and diamond are very difficult under the mild conditions that are necessary for the film-type fabricated devices. , …”