2008
DOI: 10.1016/j.physleta.2008.08.072
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Microplasma array devices with coplanar electrodes operating in neon

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Cited by 11 publications
(5 citation statements)
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“…As previously mentioned, arrays of microplasmas would allow materials throughput to be drastically increased and enable large area deposition or modification of thin films. Microplasma arrays have been recently developed for applications in photonics [52], metamaterials [183], stealth technology/radar cloaking [184], medicine [185][186][187], environment [188,189] and lighting or display [190][191][192][193]. In the latter case, the technology is near the commercialization stage (http://www.edenpark.com).…”
Section: Microplasma Arraysmentioning
confidence: 99%
“…As previously mentioned, arrays of microplasmas would allow materials throughput to be drastically increased and enable large area deposition or modification of thin films. Microplasma arrays have been recently developed for applications in photonics [52], metamaterials [183], stealth technology/radar cloaking [184], medicine [185][186][187], environment [188,189] and lighting or display [190][191][192][193]. In the latter case, the technology is near the commercialization stage (http://www.edenpark.com).…”
Section: Microplasma Arraysmentioning
confidence: 99%
“…Microplasma science and technology is an intersection of plasma science, photonics, and materials science, which offers not only a realm of plasma phenomenology but also device functionality [ 1 - 4 ]. Such plasma-based devices exhibit great potential for a broad spectrum of applications in microdisplays, on-chip frequency standards, materials synthesis, elemental analysis, and detectors of environmentally hazardous or toxic gases or vapors [ 5 - 11 ] But due to the insufficient luminous efficiency of the plasma devices [ 12 ], development of a cathode material with efficient emission of secondary electrons for improving the initiation efficiency of plasma illumination is thus called for. Among carbon-based materials, diamond is a promising material for applications in various electronic and microelectromechanical devices due to its unparalleled intrinsic properties such as wide energy band gap, chemical inertness, extreme hardness, high thermal conductivity, and negative electron affinity [ 13 - 16 ].…”
Section: Introductionmentioning
confidence: 99%
“…In the operation of a microplasma device, the stability of the plasma is of great concern. [1][2][3] Materials with a large secondary electron emission efficiency are thus commonly used as the cathode for these devices. However, the robustness (the lifetime) of the devices is a characteristic which is of even more importance in device applications.…”
Section: Introductionmentioning
confidence: 99%