1995
DOI: 10.1016/0168-9002(94)01216-4
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Microstrip gas chamber on thin-film Pestov glass and micro gap chamber

Abstract: Pestov glass and the Micro Gap Chamber and refrain from any discussion on rate capability or long-term stability un-Abstract til thorough studies have been completed. We report developments of the Microstrip Gas Chamber on thin-film Pestov glass and the Micro Gap Chain-II. MICROSTRIP GAS CHAMBER ON bet. By coating a thin-layer of low-resistive, electronically-THIN-FILM PESTOV GLASS conductive glass on various substrates (including quartz and ceramics), we built MSGCs of high gain stability and low leakage curr… Show more

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Cited by 6 publications
(1 citation statement)
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“…For comparison, MGC having 2 pm thick Si02 insulating layer was also built. The Si02 film was deposited on the low resistivity silicon substrate using low-pressure chemical vapor deposition (LPCVD), which is effective in making a high quality Si02 film [9]. In order to improve the relatively poor electrical properties of LPCVD oxide, the film was densified at 900OC for 30 minutes in a nitrogen atmosphere.…”
Section: Ileixe'erimentalproceduresandsexupsmentioning
confidence: 99%
“…For comparison, MGC having 2 pm thick Si02 insulating layer was also built. The Si02 film was deposited on the low resistivity silicon substrate using low-pressure chemical vapor deposition (LPCVD), which is effective in making a high quality Si02 film [9]. In order to improve the relatively poor electrical properties of LPCVD oxide, the film was densified at 900OC for 30 minutes in a nitrogen atmosphere.…”
Section: Ileixe'erimentalproceduresandsexupsmentioning
confidence: 99%