Microstructure cantilever beam for current measurement

Mustafa, Haithem A. B.; Khan, Mohamed Tariq E.

doi:10.4102/sajs.v105i7/8.58

Cited by 5 publications

(2 citation statements)

References 5 publications

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“…They play an important role in modern power electronics systems for purposes of protection and control. Due to the advantages of small size, low cost, reduced power consumption and great integration abilities, the current sensors based on MEMS (microelectromechanical systems) technologies have gained more and more attention [2][3][4][5][6][7][8][9][10]. These sensors mainly measure the current based on the relationship between the amplitudes of the sensing elements and the current detected.…”

Section: Introductionmentioning

confidence: 99%

Sensitivity enhancement of a microcantilever based DC current sensor by using its torsional modes

Zhang

Zhao

Jiang

et al. 2014

Meas. Sci. Technol.

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This paper investigated the current sensitivity of a resonant sensor based on a magnetically actuated piezoresistive microcantilever in different resonant modes, which were the first flexural mode and the first and second torsional modes. The sensor was based on the idea of measuring the electrothermally induced resonance frequency shift as a result of the Joule heating dissipated when the DC current flowed through the Wheatstone bridge on the microcantilever. Two theoretical models between the microcantilever’s resonance frequency and the square of the applied DC current for the sensor operating under the flexural and torsional modes were established. From the experimental results, it can be seen that the current sensitivity of the first torsional mode is an order of magnitude greater than the first flexural mode, but less than that of the second torsional mode. In addition, the effect of the DC current’s direction on the measured results should be taken into account before detecting the DC current.

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Section: Introductionmentioning

confidence: 99%

Sensitivity enhancement of a microcantilever based DC current sensor by using its torsional modes

Zhang

Zhao

Jiang

et al. 2014

Meas. Sci. Technol.

View full text Add to dashboard Cite

show abstract

“…Due to the advantages of small size, low cost, reduced power consumption and great integration abilities, the sensor based on MEMS (microelectromechanical systems) technology has been developed to detect current [4][5][6][7][8][9][10][11][12]. These sensors mainly measure the current based on the relationship between the amplitudes of the sensing elements and the current detected.…”

Section: Introductionmentioning

confidence: 99%

DC current measurement utilizing a resonant magnetically actuated piezoresistive microcantilever

Zhang

Zhao

Jiang

et al. 2013

Meas. Sci. Technol.

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This paper presents a novel current sensor by using a resonant piezoresistive microcantilever combined with magnetic actuation for the first time. An actuation power of several microwatts was necessary for stable self-oscillation. The sensor measured the DC current by obtaining the electrothermally induced resonant frequency shift of the microcantilever as a result of the Joule heating dissipated when the DC current flowed through the Wheatstone bridge on the microcantilever. Two theoretical models were established between the microcantilever's resonant frequency and the square of the DC current. The experimental results showed that the accuracy in the range of 0.5–5 mA (apart from 0.5 mA) using the two models was 2.60% and 1.00% with correlation coefficient value R > 0.999 in both cases, respectively. The current sensitivity of the sensor was about −3.983 Hz mA−2 in the range of 0.5–5 mA. To maintain stable results, the sensor chip should be sealed in vacuum and integrated into an oven-control system.

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An ANN model of polymer based MEMS structures: A modal analysis approach

Katageri¹,

Sheeparamatti²

2014

2014 International Conference on Smart Structures and Systems (ICSSS)

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Microstructure cantilever beam for current measurement

Cited by 5 publications

References 5 publications

Sensitivity enhancement of a microcantilever based DC current sensor by using its torsional modes

Sensitivity enhancement of a microcantilever based DC current sensor by using its torsional modes

DC current measurement utilizing a resonant magnetically actuated piezoresistive microcantilever

An ANN model of polymer based MEMS structures: A modal analysis approach

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