Microwave and millimeter-wave high-Q micromachined resonators

Brown, Andrew R.; Blondy, Pierre; Rebeiz, Gabriel M.

doi:10.1002/(sici)1099-047x(199907)9:4<326::aid-mmce4>3.0.co;2-y

Cited by 34 publications

(19 citation statements)

References 13 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Continued progress will require 3D integration and RF packaging techniques [1,2] that allow for scaling. Indeed, there are numerous developed technologies waiting to see fruitful implementation in the field of circuit-QED (cQED), both from room temperature microwave devices [3,4] and complex superconducting circuits [5][6][7]. To address this opportunity and the associated challenges for quantum coherence, we recently proposed the multilayer microwave integrated quantum circuit (MMIQC) architecture [8], which adapts many existing circuit design and fabrication techniques to cQED.…”

Section: Introductionmentioning

confidence: 99%

Micromachined Integrated Quantum Circuit Containing a Superconducting Qubit

et al. 2017

View full text Add to dashboard Cite

We present a device demonstrating a lithographically patterned transmon integrated with a micromachined cavity resonator. Our two-cavity, one-qubit device is a multilayer microwave integrated quantum circuit (MMIQC), comprising a basic unit capable of performing circuit-QED (cQED) operations. We describe the qubit-cavity coupling mechanism of a specialized geometry using an electric field picture and a circuit model, and obtain specific system parameters using simulations. Fabrication of the MMIQC includes lithography, etching, and metallic bonding of silicon wafers. Superconducting wafer bonding is a critical capability that is demonstrated by a micromachined storage cavity lifetime of 34.3 µs, corresponding to a quality factor of 2 million at single-photon energies. The transmon coherence times are T1 = 6.4 µs, and T Echo 2 = 11.7 µs. We measure qubit-cavity dispersive coupling with rate χqµ/2π = −1.17 MHz, constituting a Jaynes-Cummings system with an interaction strength g/2π = 49 MHz. With these parameters we are able to demonstrate cQED operations in the strong dispersive regime with ease. Finally, we highlight several improvements and anticipated extensions of the technology to complex MMIQCs.

show abstract

Section: Introductionmentioning

confidence: 99%

Micromachined Integrated Quantum Circuit Containing a Superconducting Qubit

et al. 2017

View full text Add to dashboard Cite

show abstract

“…1d), we see that plane H of Figure 1c maximizes y seam . However, this orientation of seam is the natural consequence of the micromachining process 5 . Therefore, for a low-loss micromachined cavity, it is imperative to develop a method of wafer-scale superconducting bonding that maximizes g seam .…”

Section: The Seam As a Loss Mechanism In Cavity Resonatorsmentioning

confidence: 99%

Demonstration of superconducting micromachined cavities

Brecht

Reagor

Chu

et al. 2015

Applied Physics Letters

View full text Add to dashboard Cite

Superconducting enclosures will be key components of scalable quantum computing devices based on circuit quantum electrodynamics (cQED). Within a densely integrated device, they can protect qubits from noise and serve as quantum memory units. Whether constructed by machining bulk pieces of metal or microfabricating wafers, 3D enclosures are typically assembled from two or more parts. The resulting seams potentially dissipate crossing currents and limit performance. In this Letter, we present measured quality factors of superconducting cavity resonators of several materials, dimensions and seam locations. We observe that superconducting indium can be a low-loss RF conductor and form low-loss seams. Leveraging this, we create a superconducting micromachined resonator with indium that has a quality factor of two million despite a greatly reduced mode volume. Inter-layer coupling to this type of resonator is achieved by an aperture located under a planar transmission line. The described techniques demonstrate a proof-of-principle for multilayer microwave integrated quantum circuits for scalable quantum computing.

show abstract

“…In this case, a reduced height resonant waveguide cavity (with dimensions of λ/2-square) is etched in a silicon wafer and fed either by a slot transition or by bond wires. Since the fields are not confined to planar resonators, these structures have yielded Q's around 500 at 10 GHz, and up to 1,100 at 30 GHz [41,42]. Research is under way to use these miniature waveguide cavities in satellite filters and low-phase noise oscillators.…”

Section: Micromachined Filters For K-band and Highermentioning

confidence: 99%

Micromachined devices for wireless communications

1998

View full text Add to dashboard Cite

Abstract-An overview of recent progress in the research and development of micromachined devices for use in wireless communication sub-systems is presented. Among the specific devices described are tunable micromachined capacitors, integrated high-Q inductors, micromachined low-loss microwave and mm-wave filters, low loss micromechanical switches, microscale vibrating mechanical resonators with Q's in the tens of thousands, and miniature antennas for mm-wave applications. Specific applications are reviewed for each of these components with emphasis on methods for miniaturization and performance enhancement of existing and future wireless transceivers.

show abstract

Microwave and millimeter-wave high-Q micromachined resonators

Cited by 34 publications

References 13 publications

Micromachined Integrated Quantum Circuit Containing a Superconducting Qubit

Micromachined Integrated Quantum Circuit Containing a Superconducting Qubit

Demonstration of superconducting micromachined cavities

Micromachined devices for wireless communications

Contact Info

Product

Resources

About