Abstract-A novel flip chip process is reported in which bare dies are thermosonically bonded to arrays of electroplated copper columns formed on a substrate. The new process is intended as a low-cost, lead-free chip-on-board (COB) interconnection method for high-frequency devices. A detailed study has been performed of the electroplating and thermosonic bonding techniques involved. It was found that oxygen plasma treatment of the resist mask could increase the yield of the fine-pitch ( 150 m) column electroplating process, while the flatness of the resulting columns was affected by the plating current density and the sidewall profiles in the resist mold. Under optimal conditions, column arrays with flat tops could be produced with a 100% yield, and with a column height deviation of less than 0.5 m over an area of 10 mm 10 mm. The array thermosonic bonding process was studied with the aid of Box-Behnken design of experiments based on response surface methodology. A second-order relationship between the input bonding variables and the bonding strength was derived and used to determine optimal process conditions. With this optimized process, silicon chips with aluminium metallization were thermosonically flip chip bonded to quartz test boards bumped with gold-capped copper columns. Sixteen prototype assemblies without underfill protection were evaluated by accelerated lifetime tests. The contact resistances of single column connections showed no significant change after 50 thermal shocks of 0 C to 100 C, and samples subjected to high-temperature storage remained intact at all bonding interfaces after 1.5 h at 300 C. Thermal cycling between 55 C and 125 C produced open-circuit defects in a small number of connections after 70 cycles.Index Terms-Chip-on-board, copper column, design of experiments, electroplating, flip chip, lead-free, oxygen plasma treatment, response surface methodology, thermosonic (TS) bonding.