Miniature all-glass robust pressure sensor

Cibula, Edvard; Pevec, Simon; Lenardic, Borut; Pinet, Éric; Đonlagić, Denis

doi:10.1364/oe.17.005098

Cited by 73 publications

(37 citation statements)

References 13 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Yet new approaches are contributing to enhance the potential of miniaturization offered by FOS. 115,[152][153][154][155] Totsu et al 115,152 have presented a sensor of only 125 μm OD to monitor pressure in the heart and aorta of a goat. The F-P cavity (∼2 μm depth) was composed of two mirrors, a chromium half-mirror located at the tip of a multimode fiber (MMF), and an aluminum mirror in the head of the sensor.…”

Section: 151mentioning

confidence: 99%

“…115,152 A slightly different vacuum sealed F-P cavity technique was proposed for temperature compensation. 152 Cibula et al 154,155 were also capable of presenting a similar sensor (125 μm OD). In this case the diaphragm was designed to be a part of the OF, because the bonding process used in the work of Totsu et al 115,152 limited the temperature range and sensor long-term stability.…”

Section: 151mentioning

confidence: 99%

See 1 more Smart Citation

Review of fiber-optic pressure sensors for biomedical and biomechanical applications

Roriz

Frazão

Ribeiro³

et al. 2013

J. Biomed. Opt

196

View full text Add to dashboard Cite

Abstract. As optical fibers revolutionize the way data is carried in telecommunications, the same is happening in the world of sensing. Fiber-optic sensors (FOS) rely on the principle of changing the properties of light that propagate in the fiber due to the effect of a specific physical or chemical parameter. We demonstrate the potentialities of this sensing concept to assess pressure in biomedical and biomechanical applications. FOSs are introduced after an overview of conventional sensors that are being used in the field. Pointing out their limitations, particularly as minimally invasive sensors, is also the starting point to argue FOSs are an alternative or a substitution technology. Even so, this technology will be more or less effective depending on the efforts to present more affordable turnkey solutions and peer-reviewed papers reporting in vivo experiments and clinical trials. © The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

show abstract

Section: 151mentioning

confidence: 99%

Section: 151mentioning

confidence: 99%

Review of fiber-optic pressure sensors for biomedical and biomechanical applications

Roriz

Frazão

Ribeiro³

et al. 2013

J. Biomed. Opt

196

View full text Add to dashboard Cite

show abstract

“…[3][4][5][6][7] Temperature sensitivity and temperature maximums are important practical limitations for many of these sensors. For instance, the temperature sensitivity of Bragg grating and IFPI sensors are well known.…”

Section: Introductionmentioning

confidence: 99%

“…An EFPI sensor can also be fabricated using wet chemical etching in which diluted hydrofluoric acid forms a cavity in the tip of a multimode fiber, and this cavity is fused with a single-mode fiber. 21 This latter EFPI alternative has good temperature characteristics, but it suffers from safety concerns during fabrication and from difficulty in controlling the etch, i.e., for calibrating the cavity length.…”

Section: Introductionmentioning

confidence: 99%

Microcavity strain sensor for high temperature applications

et al. 2014

View full text Add to dashboard Cite

Abstract. A microcavity extrinsic Fabry-Perot interferometric (EFPI) fiber-optic sensor is presented for measurement of strain. The EFPI sensor is fabricated by micromachining a cavity on the tip of a standard single-mode fiber with a femtosecond (fs) laser and is then self-enclosed by fusion splicing another piece of single-mode fiber. The fs-laser-based fabrication makes the sensor thermally stable to sustain temperatures as high as 800°C. The sensor exhibits linear performance for a range up to 3700 με and a low temperature sensitivity of only 0.59 pm∕°C through 800°C.

show abstract

“…A pressure sensor based on micro FP cavity commonly uses an elastic diaphragm at the fiber tip such as SiO 2 /silica, polymer, silver and graphene film [12][13][14][15][16][17][18][19][20]. The pressure sensitivity of the diaphragm-based fiber tip FP sensor is defined as the ratio of the FP cavity length variation to the pressure change, which critically depends on the size and the mechanical quality of the diaphragm employed.…”

Section: Introductionmentioning

confidence: 99%

Compressible fiber optic micro-Fabry-Pérot cavity with ultra-high pressure sensitivity

Wang¹,

Wang²,

Wang³

et al. 2013

Opt. Express

View full text Add to dashboard Cite

Abstract:We propose and demonstrate a pressure sensor based on a micro air bubble at the end facet of a single mode fiber fusion spliced with a silica tube. When immersed into the liquid such as water, the air bubble essentially acts as a Fabry-Pérot interferometer cavity. Such a cavity can be compressed by the environmental pressure and the sensitivity obtained is >1000 nm/kPa, at least one order of magnitude higher than that of the diaphragm-based fiber-tip sensors reported so far. The compressible FabryPérot interferometer cavity developed is expected to have potential applications in highly sensitive pressure and/or acoustic sensing. 447-449 (2005). 13. D. Donlagic and E. Cibula, "All-fiber high-sensitivity pressure sensor with SiO 2 diaphragm," Opt. Lett. 30(16), 2071-2073 (2005). 14. X. Wang, J. Xu, Y. Zhu, K. L. Cooper, and A. Wang, "All-fused-silica miniature optical fiber tip pressure sensor," Opt. Lett. 31(7), 885-887 (2006). 15. W. Wang, N. Wu, Y. Tian, C. Niezrecki, and X. Wang, "Miniature all-silica optical fiber pressure sensor with an ultrathin uniform diaphragm," Opt. Express 18(9), 9006-9014 (2010). 16. E. Cibula, S. Pevec, B. Lenardič, É. Pinet, and D. Donlagic, "Miniature all-glass robust pressure sensor," Opt.Express 17(7), 5098-5106 (2009

show abstract

Miniature all-glass robust pressure sensor

Cited by 73 publications

References 13 publications

Review of fiber-optic pressure sensors for biomedical and biomechanical applications

Review of fiber-optic pressure sensors for biomedical and biomechanical applications

Microcavity strain sensor for high temperature applications

Compressible fiber optic micro-Fabry-Pérot cavity with ultra-high pressure sensitivity

Contact Info

Product

Resources

About