Miniature Cantilever-Type Ultrasonic Motor Using Pb-Free Multilayer Piezoelectric Ceramics

Abstract

A Miniature cantilever-type ultrasonic motor was fabricated using multilayer piezoelectric ceramics (MLPC) made of (Sr,Ca)2NaNb5O15 (SCNN), a Pb-free piezoelectric material, and the electrical driving properties were investigated. The displacement of SCNN-MLPC was 177 nm at 100 V, which was 10-fold the voltage of MLPC made of Pb(Zr,Ti)O3–Pb(Ni,Nb)O3–Pb(Zn,Nb)O3 (PZT). The ultrasonic motor using SCNN-MLPC started to rotate at 3.8 Vp–p, and showed the following characteristics: a revolution speed of Ω0=517 rpm, a torque of T0=1.4 µN m, and an efficiency of η=7% at 13.4 Vp–p. The power consumption, in this case, was 0.3 mW, which is not so high. On the other hand, an ultrasonic motor of the same form made of PZT-MLPC showed Ω0=610 rpm, T0=1.6 µN m, and η=9% at 1.9 Vp–p, and the same power consumption as the SCNN motor. That is, it was found that the SCNN motor was not so different from the PZT motor in terms of their characteristics; however, the SCNN motor needed 10 times as high a voltage as the PZT motor in electrical driving. In conclusion, it can be said that we succeeded in realizing a miniature cantilever-type ultrasonic motor using Pb-free MLPC.

Origin of the large piezoelectric activity in(1−x)Ba(Zr0.2TiAcosta1, Khakpash2, Someya3 et al. 2015Phys. Rev. B1339830View full textAdd to dashboardCite

“…These materials can be co-sintered with cost-effective nickel electrodes [7], which is not currently achievable for PZT [8]. Tou et al [9] laid the groundwork for hard bismuth-based piezoceramics to be used in ultrasonic cleaners, and Doshida et al [10,11] demonstrated that lead-free piezoceramics have better performance than PZT for high power applications. Recently, a BaTiO 3 (BT)-based solid solution, (1 − x)Ba(Zr 0.2 Ti 0.8 )O 3 -x(Ba 0.7 Ca 0.3 )TiO 3 (BZT-xBCT), has attracted considerable attention due to its promising small and large signal piezoelectric properties [12,13].…”

Sodium Bismuth Titanate-Based Ceramics

“…These devices were mainly composed of PZT-based piezoelectric ceramics with a high mechanical quality factor Q m , which is called hard PZT. However, the resonant vibration of [47,72,73].…”

Piezoelectric Properties of (Bi0.5Na0.5)TiO3-Based Solid Solution at Large-Amplitude Vibration

“…Any opinions and views expressed in this publication are the opinions and views of the authors, and are not the views of or endorsed by Taylor PZT ceramics contain a large amount of Pb; therefore, lead-free piezoelectric materials to replace PZT are becoming increasingly required from the viewpoint of environmental protection. As materials for lead-free high-power applications, SrBi 2 Nb 2 O 9 and (Sr,Ca) 2 NaNb 5 O 15 ceramics and LiNbO 3 single crystals have been reported [2][3][4][5][6][7]. However, there have been few studies on the high-power piezoelectric characteristics of lead-free…”