Miniature high frequency array transducers based on new fine grain ceramics

Lethiecq, Marc; Feuillard, G.; Ratsimandresy, L.; An, Ning; Pardo, L.; Ricote, J.; Andersen, Bjørn; Millar, C.E.

doi:10.1109/ultsym.1994.401708

Cited by 18 publications

(3 citation statements)

References 6 publications

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“…These frequencies can have a range from 0.5 MHz to 50 MHz . The difficulties in machining PZT ceramics have led to maximum range of operations of <20 MHz for pure PZT; patterned ZnO and polymer films have been used to as high as 100 MHz; however, these materials do not possess the very high piezoelectric and/or favorable acoustic properties of PZT/polymer composites. In order to increase the maximum range of operations and obtain larger lateral resolution, linear and phased array transducers are used.…”

Section: Reviewmentioning

confidence: 99%

Dielectric and piezoelectric properties of PVDF/PZT composites: A review

Jain

Prashanth

Sharma

et al. 2015

Polymer Engineering & Sci

338

164

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Smart materials, which exhibit piezoelectricity, find an eclectic range of applications in the industry. The direct piezoelectric effect has been widely used in sensor design, and the inverse piezoelectric effect has been applied in actuator design. Ever since 1954, PZT and BaTiO 3 were widely used for sensor and actuator applications despite their toxicity, brittleness, inflexibility, etc. With the discovery of PVDF in 1969, followed by development of copolymers, a flexible, easy to process, nontoxic, high density alternate with high piezoelectric voltage coefficient was available. In the past 20 years, heterostructural materials like polymer ceramic composites, have received lot of attention, since these materials combine the excellent pyroelectric and piezoelectric properties of ceramics with the flexibility, processing facility, and strength of the polymers resulting in relatively high dielectric permittivity and breakdown strength, which are not attainable in a single phase piezoelectric material. The current review article is an attempt to provide a compendium of all the work carried out with reference to PVDF-PZT composites. The review article evaluates the effect of grain size, content and other factors under the purview of dielectric and piezoelectric properties while evaluating the sensitivity of the material for sensor application. POLYM. ENG. SCI., 55:1589-1616, 2015

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Section: Reviewmentioning

confidence: 99%

Dielectric and piezoelectric properties of PVDF/PZT composites: A review

Jain

Prashanth

Sharma

et al. 2015

Polymer Engineering & Sci

338

164

View full text Add to dashboard Cite

show abstract

“…This technique generally has been limited to arrays designed to operate in less than 20 MHz range. However, in recent years, several studies have proven that it is viable option for manufacturing arrays with operational center frequencies up to 30 MHz [141–143]. The most sophisticated of the arrays built was the 128-element 30 MHz 1–3 piezo-composite array developed by Michau et al [143].…”

Section: Piezoelectric High Frequency Films Devicesmentioning

confidence: 99%

Piezoelectric films for high frequency ultrasonic transducers in biomedical applications

Zhou

Lau

et al. 2011

Progress in Materials Science

313

205

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Piezoelectric films have recently attracted considerable attention in the development of various sensor and actuator devices such as nonvolatile memories, tunable microwave circuits and ultrasound transducers. In this paper, an overview of the state of art in piezoelectric films for high frequency transducer applications is presented. Firstly, the basic principles of piezoelectric materials and design considerations for ultrasound transducers will be introduced. Following the review, the current status of the piezoelectric films and recent progress in the development of high frequency ultrasonic transducers will be discussed. Then details for preparation and structure of the materials derived from piezoelectric thick film technologies will be described. Both chemical and physical methods are included in the discussion, namely, the sol–gel approach, aerosol technology and hydrothermal method. The electric and piezoelectric properties of the piezoelectric films, which are very important for transducer applications, such as permittivity and electromechanical coupling factor, are also addressed. Finally, the recent developments in the high frequency transducers and arrays with piezoelectric ZnO and PZT thick film using MEMS technology are presented. In addition, current problems and further direction of the piezoelectric films for very high frequency ultrasound application (up to GHz) are also discussed.

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“…FABRICATION OF HIGH FREQUENCY ULTRASOUND TRANSDUCERS Piezoceramic/polymer composite for ultrasound transducers has many advantages compared to monolithic ceramic such as low density resulting in a good acoustic impedance to the human body, low dielectric constant resulting in a high piezoelectric voltage constant, high coupling in the thickness mode for broad bandwidth, and high conformablility for ease of fabricating focused transducers. Ultrasonic array and single element transducers made with PZT/polymer composites have been limited to frequencies < 20 MHz because of the difficulties in machining PZT ceramics to fine feature sizes (post spacing < λ/2) [1][2][3]. Patterned ZnO [4] and polymer films [5] have been used to as high as 100 MHz; however, these materials do not possess the very high piezoelectric and/or favorable acoustic properties of PZT/polymer composites.…”

mentioning

confidence: 99%

Ceramic/polymer 2-2 composites for high frequency transducers by tape casting

Kwon

Hackenberger

Rehrig

et al.

IEEE Symposium on Ultrasonics, 2003

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The aim of this research is to produce 2-2 PZT/polymer composite using tape casting technology. PZT tapes were printed with a fugitive phase (carbon) to define voids which were then backfilled with epoxy after the carbon was removed by thermal treatment at 1250 °C. Final dimensions of the 2-2 composite were in the range of 25 µm for the ceramic bar and 5 µm for the epoxy-filled kerf. Specific emphasis was placed on achieving uniformity and straightness of the ceramic beam and kerf thicknesses. The composites were fabricated into 20 MHz single element pachymeters and benchmarked against commercial devices fabricated by dice-and-fill. The tape cast material compared favorablely with high sensitivity and a little lower bandwidth.Fabrication of a 35 MHz linear array transducer is in progress. Electrode patterning to define individual array elements has been successfully completed. 0-7803-7922-5/03/$17.00 (c)

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Miniature high frequency array transducers based on new fine grain ceramics

Cited by 18 publications

References 6 publications

Dielectric and piezoelectric properties of PVDF/PZT composites: A review

Dielectric and piezoelectric properties of PVDF/PZT composites: A review

Piezoelectric films for high frequency ultrasonic transducers in biomedical applications

Ceramic/polymer 2-2 composites for high frequency transducers by tape casting

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