2011
DOI: 10.1016/j.pmatsci.2010.09.001
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Piezoelectric films for high frequency ultrasonic transducers in biomedical applications

Abstract: Piezoelectric films have recently attracted considerable attention in the development of various sensor and actuator devices such as nonvolatile memories, tunable microwave circuits and ultrasound transducers. In this paper, an overview of the state of art in piezoelectric films for high frequency transducer applications is presented. Firstly, the basic principles of piezoelectric materials and design considerations for ultrasound transducers will be introduced. Following the review, the current status of the … Show more

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Cited by 313 publications
(219 citation statements)
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“…High frequency transducers are used for practical reasons because they offer an opportunity for smaller packaging, such as through the use of MEMS piezoelectric transducers, since the active element thickness is inversely proportional to ultrasonic wavelength. 9 In this work, the changes in state of charge and state of health are linked to variations in the first arrival time of the high frequency ultrasonic wave. According to elastic wave propagation theory, the wave propagation speed depends upon the bulk modulus, shear modulus, and density within a material.…”
mentioning
confidence: 99%
“…High frequency transducers are used for practical reasons because they offer an opportunity for smaller packaging, such as through the use of MEMS piezoelectric transducers, since the active element thickness is inversely proportional to ultrasonic wavelength. 9 In this work, the changes in state of charge and state of health are linked to variations in the first arrival time of the high frequency ultrasonic wave. According to elastic wave propagation theory, the wave propagation speed depends upon the bulk modulus, shear modulus, and density within a material.…”
mentioning
confidence: 99%
“…1 Using this type of thickness resonant mode transducer to generate ultrasonic waves in a fluid is straightforward, despite the significant acoustic impedance mismatch. It is more difficult to obtain high detection sensitivity, due to the large mismatch between the acoustic impedance of the transducer and the fluid.…”
mentioning
confidence: 99%
“…It is also of applied benefit for structural acoustics engineers interested in improvement of low-frequency sound radiation characteristics of thick piezo-composite smart circular plates in the face of uncertainties. 15,19,[41][42] These elements are of realistic concern in advancement of intelligent micro-electromechanical systems, 43,44 for which precise movement control is essential. It can readily be combined with the classical passive control methods 1,2,45,46 and/or expediently be augmented with multiple pairs of electroded piezoelectric actuator/sensor segments in a multi-input multi-output (MIMO) active control framework [47][48][49] to effectively deal with the medium-and high-frequency acoustic radiation problems.…”
Section: Introductionmentioning
confidence: 99%