2005
DOI: 10.1002/ctpp.200510037
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Modeling and Diagnostic of the Plasma of Magnetic Field Supported Discharges

Abstract: In this paper we present an experimental study of the variations of plasma parameters in both the axial as well as in radial directions in a 30 cm long cylindrical magnetron with outer cylindrically-shaped anode (diameter 58 mm) and coaxially placed cathode with a diameter of 1.8 cm. The measurements were made using three radially movable cylindrical Langmuir probes placed at three different axial positions between the magnetic coils. From the measurements there were evaluated electron density, electron mean e… Show more

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Cited by 4 publications
(1 citation statement)
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“…It is consistent with the fact that larger surface of the anode (roughly three times that of the cathode) serves as an efficient collector of electrons even with "anode fall" with electronretarding field. The comparatively high mean energy of electrons in the positive column is the consequence of the fact that for electrons, which move in radial direction, the energy relaxation length with respect to elastic collisions exceeds the radius of magnetron, see [8].…”
Section: Discussionmentioning
confidence: 99%
“…It is consistent with the fact that larger surface of the anode (roughly three times that of the cathode) serves as an efficient collector of electrons even with "anode fall" with electronretarding field. The comparatively high mean energy of electrons in the positive column is the consequence of the fact that for electrons, which move in radial direction, the energy relaxation length with respect to elastic collisions exceeds the radius of magnetron, see [8].…”
Section: Discussionmentioning
confidence: 99%