1998
DOI: 10.1109/16.711362
|View full text |Cite
|
Sign up to set email alerts
|

Modeling statistical dopant fluctuations in MOS transistors

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

4
158
0
1

Year Published

2000
2000
2017
2017

Publication Types

Select...
7
1
1

Relationship

0
9

Authors

Journals

citations
Cited by 378 publications
(163 citation statements)
references
References 24 publications
4
158
0
1
Order By: Relevance
“…Horstmann and co-workers [70] investigated global and local matching of sub-100 nm n-channel metal-oxide-semiconductor (NMOS) and p-channel metal-oxide-semiconductor (PMOS)-transistors and confirmed the area law proposed in [68]. The empirical analytical expression by Mizuno was generalized by Stolk et al [71] by taking into account the finite thickness of the inversion layer, the depth-distribution of the charge in the depletion layer and the influence of the source and drain impurity distributions. Numerical drift-diffusion and hydrodynamic simulations [72,73,74,75] have also confirmed the existence of the fluctuations in the threshold voltage in ultra-small devices.…”
Section: Discrete Impurity Effectsmentioning
confidence: 93%
“…Horstmann and co-workers [70] investigated global and local matching of sub-100 nm n-channel metal-oxide-semiconductor (NMOS) and p-channel metal-oxide-semiconductor (PMOS)-transistors and confirmed the area law proposed in [68]. The empirical analytical expression by Mizuno was generalized by Stolk et al [71] by taking into account the finite thickness of the inversion layer, the depth-distribution of the charge in the depletion layer and the influence of the source and drain impurity distributions. Numerical drift-diffusion and hydrodynamic simulations [72,73,74,75] have also confirmed the existence of the fluctuations in the threshold voltage in ultra-small devices.…”
Section: Discrete Impurity Effectsmentioning
confidence: 93%
“…However, all previous 3D simulation studies of random dopant fluctuation effects [11,15,20] do not take into account quantum effects. It is important to evaluate to what extent the quantum effects would affect the random dopant-induced threshold voltage fluctuation and lowering, and to what degree the threshold voltage lowering may compensate for the increase in the threshold voltage associated with inversion layer quantization [27].…”
Section: Simulation Approachmentioning
confidence: 99%
“…These architectures have additional benefits in terms of optimal threshold voltage control and improved mobility [19][20][21][22]. The undoped epitaxial layer thickness is restricted to approximately one-fifth of the effective channel length, due to short channel effects.…”
Section: Fluctuation Resistant Mosfet Architecturesmentioning
confidence: 99%
“…On-chip process parameter variations are classified into global variations and local variations [7]. The above adaptive techniques try to compensate for or make use of knowledge of the global component of the parameters based on measurements.…”
Section: Introductionmentioning
confidence: 99%