“…Although most of MEMS material is fabricated by polysilicon (Dellaert and Doutreloigne, 2014; Hussein et al., 2015; Kumar and Sharma, 2014), CDM can still be reasonably used into MEMS material. According to the applications of CDM, almost all materials can be applied to damage mechanics, such as metals (Cheng and Li,2020;Fan et al.,2020), polymers (Din et al., 2018), elastomers (Andriyana et al., 2015), composites (Fang et al., 2017), and concrete (Wu et al., 2020). Even if the failure mechanisms vary on the micro scale, they have more or less the same qualitative behaviors on meso- or macroscales (Lemaitre and Desmorat, 2005).…”