Modelling of device structure effects in backside illuminated CMOS compatible photodiodes

Extrinsic Evolution of the Stacked Gradient Poly-Homojunction Photodiode Genre

“…As well as maximizing the fill factor, back illumination allows the combination of different processing technologies for the two chips. Additionally, it is possible to tailor the spectral response of individual photodiodes, due to the indirect nature of the silicon absorption coefficient, which affects the electron-hole pair photogeneration profile (Hinckley et al, 2000). Back illuminated CMOS pin ultra-thin (75 μm) photodiodes have found application in medical imaging, particularly making x-ray, high quality, real time imaging possible (Goushcha et al, 2007).…”

Double boundary trench isolation effects on a stacked gradient homojunction photodiode array

“…Backwall illumination allows the spectral response of individual photodiodes to be tailored to a specific wavelength band because the depth of carrier photogeneration is proportional to the wavelength due to the indirect nature of the silicon absorption coefficient [4].…”

“…Results were also compared with the conventional single junction photodiode (SJPD), the guard ring electrode SJPD, Guard-BTI SJPD, twin BTI SJPD and the double junction Photodiode (DJPD). Due to the advantages of the backwall illumination [4], comparison was made to frontwall illumination for each photodiode geometry.…”

Simulation of a hybrid polywell and stacked gradient poly-homojunction CMOS photodiode

“…Backwall illumination has several advantages, including maximum fill factor and ability to tailor PD pixels to a specific wavelength band [2]. Back illuminated imaging arrays with UV/blue sensitivity may have applications for particle physics, plasma spectroscopy, astrophysics, and clinical chemistry [3].…”