MODULIGA: The LIGA process as a modular production method-current standardization status in Germany

Hahn, L.; Meyer, Pascal; Bade, K.; Hein, H.; Schulz, Joachim; Löchel, Bernd; Scheunemann, H.-U.; Schondelmaier, Daniel; Singleton, Laurence

doi:10.1007/s00542-004-0368-5

Cited by 7 publications

(1 citation statement)

References 12 publications

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“…This is especially true if the end product is very costly. A project named MODULIGA (Hahn et al 2005) (modular production method using the LIGA process) linked together the activities of the German LIGA centers: IMT, IMM (Institut für Mikrotechnik, Mainz), and BESSY (Berliner Elektronenspeicherring-Gesellschaft für Synchrotronstrahlung, Berlin). LIGA process steps were standardized and interface specifications were defined to establish a modular production method.…”

Section: Market Situation Of Deep X-ray Lithographymentioning

confidence: 99%

Why you will use the deep X-ray LIG(A) technology to produce MEMS?

et al. 2008

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Geometrical and dimensional tolerances, obtainable precisions, accuracy, surface quality and roughness need to be controlled in order to realise effective processes and to achieve a real improvement in micromanufacturing technologies. For the fabrication of highly precise mm parts, different processes can be chosen. The LIGA technique, a German acronym consisting of the letters LI (Röntgen Lithographie meaning X-ray lithography), G (Galvanik meaning electroforming) and A (Abformung meaning molding) developed at the Research Center Karlsruhe, offers the possibility to manufacture microstructures with a number of unique features. With these properties, LIGA is on the leading edge of microfabrication. This is a well known issue to most participants in the micro sector. However, most actors consider LIGA to be very expensive, to take much time from design up to realization, and to impose a number of quality problems. In this paper, we try to modify the perception of the LIGA process by addressing some quality properties of the process by taking two different examples and we address the throughput and cost situation by establishing a mass fabrication line for direct LIGA products at ANKA.

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Section: Market Situation Of Deep X-ray Lithographymentioning

confidence: 99%

Why you will use the deep X-ray LIG(A) technology to produce MEMS?

et al. 2008

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X‐Ray Masks for LIGA Microfabrication

Desta¹,

Goettert

2008

Advanced Micro and Nanosystems

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Ensuring repeatability in LIGA mold insert fabrication

Schulz¹,

Bade²,

Guttmann³

et al. 2004

Microsystem Technologies

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As of today, four products with LIGA parts are commercially available: microParts' spectrometer, mechanical drives by micromotion and Faulhaber and an optical fiber connector by Spinner. This indicates that LIGA technology is advancing from a pace-making technology to a key technology for microsystems fabrication. This success was made possible in part by a consistent focus on making the technology reliable. In general, the key technical issues for yield enhancement can be categorized as follows: finding and qualifying external suppliers; modifying processes to reduce handling; finding ways to monitor each machine involved; establishing quality specifications between the process steps; and last but not least improving the understanding of each process step. We give examples for all of these issues.

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MODULIGA: The LIGA process as a modular production method-current standardization status in Germany

Abstract: The LIGA process combines X-ray lithography with electroplating and molding.

Cited by 7 publications

References 12 publications

Why you will use the deep X-ray LIG(A) technology to produce MEMS?

Why you will use the deep X-ray LIG(A) technology to produce MEMS?

X‐Ray Masks for LIGA Microfabrication

Ensuring repeatability in LIGA mold insert fabrication

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