Momentum in atomic collision cascades

Sckerl, M.W.; Vicanek, M.; Sigmund, Peter

doi:10.1016/0168-583x(95)80122-3

Cited by 10 publications

(8 citation statements)

References 15 publications

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“…Sckerl et al used transport theory to investigate the angular distribution of recoils in a collision cascade as a function of recoil energy [41][42][43]. One of the findings of that work is that cascade anisotropy, defined as the recoil flux density divided by its isotropic component, decreases as the ratio of the recoil energy under consideration and the impact energy decreases.…”

Section: Discussionmentioning

confidence: 99%

Probing the limitations of Sigmund's model of spatially resolved sputtering using Monte Carlo simulations

2016

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Sigmund's model of spatially resolved sputtering is the underpinning of many models of nanoscale pattern formation induced by ion bombardment. It is based on three assumptions: (i) the number of sputtered atoms is proportional to the nuclear energy deposition (NED) near the surface, (ii) the NED distribution is independent of the orientation and shape of the solid surface and is identical to the one in an infinite medium, and (iii) the NED distribution in an infinite medium can be approximated by a Gaussian. We test the validity of these assumptions using Monte Carlo simulations of He, Ar, and Xe impacts on Si at energies of 2, 20, and 200 keV with incidence angles from perpendicular to grazing. We find that for the more commonly-employed beam parameters (Ar and Xe ions at 2 and 20 keV and non-grazing incidence), the Sigmund model's predictions are within a factor of 2 of the Monte Carlo results for the total sputter yield and the first two moments of the spatially resolved sputter yield. This is partly due to a compensation of errors introduced by assumptions (i) and (ii). The Sigmund model, however, does not describe the skewness of the spatially resolved sputter yield, which is almost always significant. The approximation is much poorer for He ions and/or high energies (200 keV). All three of Sigmund's assumptions break down at grazing incidence angles. In all cases, we discuss the origin of the deviations from Sigmund's model.

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Section: Discussionmentioning

confidence: 99%

Probing the limitations of Sigmund's model of spatially resolved sputtering using Monte Carlo simulations

2016

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“…In particular, pertinent quantities showed a divergence at m = 1/4, a value that could not be excluded as being unphysical. The solution to the problem turned out to be a third term in the expansion that is related to the gradient of the distribution of deposited energy, which likewise shows a divergence at m = 1/4, but which cancels the divergence in the momentum-related term [66,67,56]. This term was also neglected in a successful semiempirical approach [68], but the effect of the omission was limited due to the use of adjustable parameters.…”

Section: The Leading Correctionmentioning

confidence: 99%

Recollections of fifty years with sputtering

Sigmund

2012

Thin Solid Films

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The paper is an attempt to trace milestones in the understanding of sputtering by ion bombardment. The field developed rapidly between 1955 and the end of the 1980s, but several important aspects are still under active investigation today. The focus here is on the evolution of the present understanding of the process of sputter emission. The presentation is based primarily on physical arguments, supported by results from theory referred to in the text. Many research groups have contributed to this field. Doing justice to them all appears close to impossible within the given frame.

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“…Form < a the second term in the curly brackets in (6) appears to be leading for E >> W (except n = 0, of course): for m > a the relative w > 0 corrections in the moments of the deposited momentum distribution (-(W/E)"-'I2) are much greater than ones for the damage or range distributions, which are -(W/E)Zm+'12 [91.…”

Section: Me)'"nc/(3e")f(znc/ek Q )mentioning

confidence: 99%

“…We wiIl not analyse in detail the conditions which are necessary for the series (6) to be rapidly convergent: however, note one of them: (W/E)4m << 1. Below, when discussing the W / E < 1 asymptotes of the solutions, we suppose that the ratio W / E is small enough for the few first terms in (6) to determine the spatial moments with good accuracy. In particular, the noted condition for pertinent values of W / E excludes too small values of m from the consideration.…”

Section: Me)'"nc/(3e")f(znc/ek Q )mentioning

confidence: 99%

“…The expansions (6),(8) give a clue to the only method used earlier in semianalytical investigations to calculate the deposited momentum profile. The method includes tabulation of a set of the moments taking into account a pertinent number of terms in the expansion (6), and forthcoming approximate reconstruction of the distribution from the moments (for example, by the Pad6 approximants technique).…”

Section: G Gluzovmentioning

confidence: 99%

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Solution of the kinetic equation for the deposited momentum distribution. II. Threshold energy effects

Glazov

1995

J. Phys.: Condens. Matter

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The p a p continues an investigation of the depth distribution of momenNm deposited in solids by ion bombardment. finite-threshold-energy effects being discussed. It is shown that, for a wide set of system parameters, existing semianalytical techniques lead to a qualitatively inoarreet description of momentum deposition, especially in the target surface region. The most important qualitative -res of the deposited momentum distribution are considered, which cannot be ignored when finding solutions of the kinetic equation by analytiwlly based methods or interpreting numerical simulation data. Corresponding analytical and numerical results nre presented.

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Momentum in atomic collision cascades

Cited by 10 publications

References 15 publications

Probing the limitations of Sigmund's model of spatially resolved sputtering using Monte Carlo simulations

Probing the limitations of Sigmund's model of spatially resolved sputtering using Monte Carlo simulations

Recollections of fifty years with sputtering

Solution of the kinetic equation for the deposited momentum distribution. II. Threshold energy effects

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