Monitoring of the morphologic reconstruction of deposited ablation products in laser irradiation of silicon

Abstract

Using electron microscopy, atomic force microscopy, X-ray microanalysis, and IR spectroscopy, it was established that, in the regime of continuous laser irradiation of silicon at P = 170 W in different gaseous atmospheres with an oxygen impurity, SiOx composite films with a complex morphology form. The main components of ablation products are clusters that form during flight of ablation products and as a result of separation of SiOx-clusters from the zone of the irradiation channel. The roughness and density of the films depend on the heating temperature of the target surface and the type of deposited clusters

Laser irradiation of α-SiC ceramics

“…On the surface of a collective plate, a SiO 2 film forms [15][16][17][18][19]. This is substantiated by the IR-spectroscopy data (Fig.…”

Nanoscaled Fractal Superstructures via Laser Patterning—A Versatile Route to Metallic Hierarchical Porous Materials

“…Investigations into the inner structure of resulting cauliflowers substantiate a formation process based on layer‐by‐layer deposition of reaction products recondensing onto microstructures created by the earlier scan(s) ( Figure a). The studies of Kask et al, [ 30 ] Vlasova et al, [ 31 ] and Aksenov et al [ 32 ] provide detailed insights into fractal pattern formation in and around laser plasmas. The cross‐sectional view onto a FIB‐sliced cauliflower reveals that early deposits fuse due the close proximity to the recondensation zone center.…”