Monolithic integration of micro-channel on disposable flow sensors for medical applications

Billat, S.; Kliche, K.; Gronmaier, R.; Nommensen, P.; Auber, J.; Hedrich, F.; Zengerle, Roland

doi:10.1016/j.sna.2007.10.059

Cited by 23 publications

(12 citation statements)

References 6 publications

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“…Other monolithically integrated channels allow structures achievable by the used etching mechanism e.g. triangular shapes [2] or round shapes [7][8] only. Additionally the manufacturing processes in [2,7] and [8] do not allow to determine the channel characteristics in a way that an accurate model can be calculated for model based calibration.…”

Section: Sensor Design and Fabricationmentioning

confidence: 99%

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In-process parameter calibration of thermoelectrical flow sensors with monolithic integrated channel

Kropp

Brauns

Sosna

et al. 2011

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference

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A time consuming and expensive part of sensor fabrication, especially for flow sensors, is the calibration of each fabricated sensor. This is necessary because of inaccuracy in sensor fabrication and assembly. With the help of an analytical model containing some important sensor parameters, which are obtained in-process during the fabrication, we show that it is possible to calibrate the sensor with respect to the flow rate within a deviation of ±5% for thermoelectrical flow sensors with monolithic integrated channels. An expensive single sensor calibration is thereby prevented. The model based calibration is possible due to the accurate acquisition of geometries of the monolithic integrated channel design compared e.g. to attaching a channel formed by injection molding. Solving technological issues will increase the accuracy of resulting calibrated systems.

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Section: Sensor Design and Fabricationmentioning

confidence: 99%

“…The calibration is necessary due to the dependence of the sensor output signal on e.g. diameter and form of the channel and placement of the sensor in the channel [2]. Here thermoelectrical flow sensors with monolithically integrated channel structures are used ( Fig.…”

Section: Introductionmentioning

confidence: 99%

In-process parameter calibration of thermoelectrical flow sensors with monolithic integrated channel

Kropp

Brauns

Sosna

et al. 2011

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference

View full text Add to dashboard Cite

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“…Microfabrication techniques commonly used to create channels range from wet and dry etching to embossing and replica molding. 1 Among these methods, soft lithography techniques are particularly popular in the design and optimization of microfluidic devices, [2][3][4][5][6][7] micro-electro-mechanical-systems (MEMS), [8][9][10][11] and in surface patterning for medical applications. 12,13 In all these situations, quality assessment of the fabricated features or surface patterns is of crucial importance to the final use of the device.…”

Section: Introductionmentioning

confidence: 99%

A rapid and economical method for profiling feature heights during microfabrication

et al. 2011

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Quality control is an important and integral part to any microfabrication process. While the widths of features often can be easily assessed by light microscopy, the heights of the fabricated structures are more difficult to determine. Here, we present a rapid, accurate, and low-cost method to measure the heights of microfabricated structures during and after the fabrication process. This technique is based on white-light interferometry, which offers accuracy on the submicrometre scale.

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“…A special category of flow sensors enables the quantification of fluid flow within microchannels. Although this is not a novel application field (Esashi 1991;Lammerink et al 1993), it was not up until recently that microfluidic flow sensors have gain intense interest, pushed by the general boost of microfluidics and the trend to fabricate efficient Lab-on-a-chip systems (Billat et al 2008;Kontakis et al 2009;Buchner et al 2007;Dijkstra et al 2008).…”

Section: Introductionmentioning

confidence: 99%

Modelling and evaluation of a thermal microfluidic sensor fabricated on plastic substrate

2011

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The simulation and the experimental evaluation of a thermal microfluidic flow sensor are presented in this work. The sensor was evaluated in calorimetric mode with water flow. The simulation was performed with COMSOL package. Various combinations of microchannel geometries were tested in different input flows. The optimum pair of upstream-downstream sensing elements were extracted theoretically and verified experimentally. The operational parameters of the device were simulated by 3D models and the optimum conditions were determined for various flow ranges.

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Monolithic integration of micro-channel on disposable flow sensors for medical applications

Cited by 23 publications

References 6 publications

In-process parameter calibration of thermoelectrical flow sensors with monolithic integrated channel

In-process parameter calibration of thermoelectrical flow sensors with monolithic integrated channel

A rapid and economical method for profiling feature heights during microfabrication

Modelling and evaluation of a thermal microfluidic sensor fabricated on plastic substrate

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