Monolithically fabricated polymermems 3-axis thermal accelerometers designed for automated wirebonder assembly

Tsang, See-Ho; Ma, A.H.; Karim, K.S.; Parameswaran, Ash M.; Leung, Albert M.

doi:10.1109/memsys.2008.4443797

Cited by 16 publications

(7 citation statements)

References 3 publications

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“…The uniaxial thermal accelerometer emerged in 1997 by Leung et al, 41 the dual-axis thermal accelerometer was proposed in 1998 by Leung et al, 42 and the tri-axial was proposed in 2008 by Tsang. 43 The uniaxial, dualaxis and tri-axis thermal accelerometers are shown in Figs. 9a-9b and Fig.…”

Section: Viscous Float Accelerometermentioning

confidence: 99%

Review—Basic and Advanced Inertial Navigation Fluid-Based Technology

2023

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This article reviews most published inertial sensor technologies, including dynamically tuned, optical, microelectromechanical vibratory, mechanical, solid-state, and fluid-based. The working principles of the technologies are elaborated. Also, the advantages and disadvantages of those sensors are laid out. Owing to their excellent overall performance, such as its simple structure, low cost, large measurement range, etc., the current review focuses on the state-of-the-art of fluid-based technology of accelerometers and gyroscopes. The sensing elements of the fluid-based technology that are used in the accelerometer and gyroscope are explained. Moreover, a comparison and analysis of those sensing elements are presented. The comparison shows that the thermal resistor has five orders of magnitude which is the highest dynamic range. However, the porous transducer is higher in bandwidth which is almost 120 Hz. Furthermore, the particle imaging velocimetry gyroscope (PIVG) is reviewed. The PIVG is an innovative technology that is used to measure the angular rate where fluid is used as proof of mass. The review shows that the PIVG is low-cost and almost drift-free. Additionally, compared to commercially available gyroscopes, PIVG provides a superior signal-to-noise ratio.

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Section: Viscous Float Accelerometermentioning

confidence: 99%

Review—Basic and Advanced Inertial Navigation Fluid-Based Technology

2023

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“…So, it took a while for such a convective device to be implemented. By means of integration of polymeric materials into MEMS process to attain the required mechanical flexibility, the first tri-axial accelerometer was reported in 2008 [44,45]. Using surface micromachining on Si substrates with polyimide as a structural layer, out-of-plane/ buckled sensing structures were assembled.…”

Section: Thermal Accelerometer In Mems Processmentioning

confidence: 99%

A review of micromachined thermal accelerometers

Mukherjee¹,

Basu²,

Mandal³

et al. 2017

J. Micromech. Microeng.

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Thermal convection based micro-electromechanical accelerometer is a relatively new kind of acceleration sensor that does not require a solid proof mass, yielding unique benefits like high shock survival rating, low production cost, and integrability with CMOS integrated circuit technology. This article provides a comprehensive survey of the research, development, and current trends in the field of thermal acceleration sensors, with detailed enumeration on the theory, operation, modeling, and numerical simulation of such devices. Different reported varieties and structures of thermal accelerometers have been reviewed highlighting key design, implementation, and performance aspects. Materials and technologies used for fabrication of such sensors have also been discussed. Further, the advantages and challenges for thermal accelerometers vis-à-vis other prominent accelerometer types have been presented, followed by an overview of associated signal conditioning circuitry and potential applications.

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“…The 'concentric cylinders' model applies to the class of thermal accelerometers with distributed long heaters along a line, such as the singleaxis thermal accelerometers. The 'concentric spheres' model, however, applies to the class of thermal accelerometers with concentrated heaters, such as the two-axis [3, 10] and threeaxis [13,14] thermal accelerometers.…”

Section: Designmentioning

confidence: 99%

“…Preliminary versions of the three-axis thermal accelerometers are made by [13] and subsequently optimized by [14] to achieve higher sensitivities. These two prior works designed and fabricated three-axis accelerometers based on two heaters that were concentrated at the centers of two separate sensor plates.…”

Section: Introductionmentioning

confidence: 99%

Micromachined three-axis thermal accelerometer with a single composite heater

Bahari¹,

Leung²

2011

J. Micromech. Microeng.

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A novel three-axis thermal accelerometer is designed, fabricated, and characterized in this paper. The device includes two half sensor plates attached to buckled cantilevers to form out-of-plane structures. Cantilevers are assembled by a single push of a microprobe and preserve their shapes when they latch into stoppers anchored to the substrate. The fabrication process is based on surface micromachining on silicon substrates using polyimide as the structural layer and amorphous silicon as the sacrificial layer. The fabricated devices are individually packaged and characterized. Using a total heater power of 2.5 mW, the X, Y, and Z axes, respectively, showed sensitivities of 66, 64, and 25 µV g−1. Compared to the earlier versions of the same class accelerometers, the fabricated single heater accelerometer demonstrates more than fourfold sensitivity improvement.

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Monolithically fabricated polymermems 3-axis thermal accelerometers designed for automated wirebonder assembly

Cited by 16 publications

References 3 publications

Review—Basic and Advanced Inertial Navigation Fluid-Based Technology

Review—Basic and Advanced Inertial Navigation Fluid-Based Technology

A review of micromachined thermal accelerometers

Micromachined three-axis thermal accelerometer with a single composite heater

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