Monte-Carlo simulation and analytical expressions for the extrapolated range and transmission rate of low energy electrons [10 eV–10 keV] in 11 monoatomic materials

Surface ionizing dose deposited by low energy electrons (10 eV–10 keV) in eleven monoatomic materials: Monte Carlo calculations and analytical expressions

“…This is what we did in a previous paper [17]. The Monte Carlo electron transport code MicroElec [18][19][20], a module of GEANT4 [21], has been used for 11 materials as a reference to extend the validity domain of the range/energy and transmission probability expressions proposed by Kobetich & Katz [10,11].…”

“…The models developed for high energies (> keV) fail at very low energy and the formula established at higher energies, in the form of a power law relationship, becomes invalid below 1 keV. In our previous work [17], we have extended the work of Kobetich and Katz [10,11], which is based on the expressions proposed by Weber [9]. These expressions have been made applicable for low energy electrons, down to a few tens of eVs.…”

“…Above some keV the transport of electrons can be approximated by simple laws that neglect at first order the statistical fluctuation of the transport process. But this approximation becomes invalid at lower energies [17]. Consequently, the validity of the expressions based on a constant energy loss or power law extends at best down to ~1 keV, even though they are used for the SEY of electrons of a few hundred eVs.…”

“…The Monte Carlo electron transport code MicroElec [18][19][20], a module of GEANT4 [21], has been used for 11 materials as a reference to extend the validity domain of the range/energy and transmission probability expressions proposed by Kobetich & Katz [10,11]. The improved formula ranges from a few tens of eV up to several tens of MeV [17].…”

“…In this paper, we propose an analytical expression for the dose-depth profile of low energy electrons. This expression uses our analytical model for the range and transmission rate of electrons [17]. Our approach was to follow the physics of the transport of low energy electrons, to derive analytical expressions for the dose profiles.…”