Monte Carlo simulation of ion beam penetration in solids

Adesida, I.; Karapiperis, L.

doi:10.1080/00337578208229936

Cited by 45 publications

(3 citation statements)

References 35 publications

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“…Computer-aided calculations of ion-solid interactions can greatly simplify the process of estimating sputtering rates, the intensity of ion-induced secondary electron emission, and the magnitude of the milling-induced damage layer for any given set of parameters~e.g., incident ion, target material, ion energy, etc.!. Multiple methodologies have been applied in the area of computer modeling~Biersack and Haggmark, 1980;Guinan and Kinney, 1982;Adesida and Karapiperis, 1982;Garrison et al, 1994;Sanders et al, 1994;Rosencrance et al, 1995! ; however, as long as the criteria illustrated below are met, readily available Monte Carlo methods may be used.…”

Section: Stopping Power and Rangementioning

confidence: 99%

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The Correlation between Ion Beam/Material Interactions and Practical FIB Specimen Preparation

Prenitzer¹,

et al. 2003

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Abstract:The focused ion beam~FIB! tool has been successfully used as both a stand alone analytical instrument and a means to prepare specimens for subsequent analysis by SEM, TEM, SIMS, XPS, and AUGER.In this work, special emphasis is given to TEM specimen preparation by the FIB lift-out technique. The fundamental ion/solid interactions that govern the FIB milling process are examined and discussed with respect to the preparation of electron transparent membranes. TRIM, a Monte Carlo simulation code, is used to physically model variables that influence FIB sputtering behavior. The results of such computer generated models are compared with empirical observations in a number of materials processed with an FEI 611 FIB workstation. The roles of incident ion attack angle, beam current, trench geometry, raster pattern, and target-material-dependent removal rates are considered. These interrelationships are used to explain observed phenomena and predict expected milling behaviors, thus increasing the potential for the FIB to be used more efficiently with reproducible results.

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Section: Stopping Power and Rangementioning

confidence: 99%

“…Multiple methodologies have been applied in the area of computer modeling~Bier-sack and Haggmark, 1980;Guinan and Kinney, 1982;Adesida and Karapiperis, 1982;Garrison et al, 1994;Sanders et al, 1994;Rosencrance et al, 1995! ;however, as Lindhard, Scharff, and Schiott~LSS!…”

Section: Stopping Power and Rangementioning

confidence: 99%

The Correlation between Ion Beam/Material Interactions and Practical FIB Specimen Preparation

Prenitzer¹,

et al. 2003

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“…In the binary CM frame for an ion colliding with a target atom, the scattering angle θ c is given by [20]…”

Section: Multiple Scatteringmentioning

confidence: 99%

Interactions of fast C₂₀clusters with solids: Coulomb explosions, charge states and energy losses

Wang

Mišković

2004

J. Phys.: Condens. Matter

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The dielectric response formalism is used to evaluate the dynamically screened interaction potential among the ions in a fast C20 cluster passing through a solid target. This potential is further used to calculate the individual ion charge states in the cluster by means of a statistical–variational theory which takes into account the effects of the vicinity of the neighbouring ions. Coulomb explosion and the energy losses of the cluster are simulated by solving equations of motion for individual ions while taking into account, in a self-consistent manner, the variation of ion charges in the course of explosion. Moreover, a Monte Carlo method is used to simulate the effects of multiple scattering of cluster constituent ions on target atoms. It is found that, owing to the wake-like asymmetry of the inter-ionic potential, both the distribution of ion charges in the cluster and the Coulomb explosion patterns exhibit strong spatial asymmetries in the direction of motion. It is also shown that the cluster energy losses exhibit characteristic interferences due to the vicinity effects, which diminish after long dwell times.

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A Short Overview on Monte Carlo Simulations of Ion Beam Penetration into Amorphous Solids

Posselt

1986

phys. stat. sol. (a)

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Monte Carlo simulation of ion beam penetration in solids

Cited by 45 publications

References 35 publications

The Correlation between Ion Beam/Material Interactions and Practical FIB Specimen Preparation

The Correlation between Ion Beam/Material Interactions and Practical FIB Specimen Preparation

Interactions of fast C₂₀clusters with solids: Coulomb explosions, charge states and energy losses

A Short Overview on Monte Carlo Simulations of Ion Beam Penetration into Amorphous Solids

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Monte Carlo simulation of ion beam penetration in solids

Cited by 45 publications

References 35 publications

The Correlation between Ion Beam/Material Interactions and Practical FIB Specimen Preparation

The Correlation between Ion Beam/Material Interactions and Practical FIB Specimen Preparation

Interactions of fast C20clusters with solids: Coulomb explosions, charge states and energy losses

A Short Overview on Monte Carlo Simulations of Ion Beam Penetration into Amorphous Solids

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Product

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Interactions of fast C₂₀clusters with solids: Coulomb explosions, charge states and energy losses