“…Besides, GaAs has a wide direct band gap material. Therefore, it can be used to emit light efficiently and makes them an excellent material for space and optical windows in high power application [8,9]. By the simulation of detailed calculation with full damage cascades, the plots of ion trajectories, depth vs. Y-Axis, depth vs. Z-Axis, transverse view, ionization, phonons, collision events, atom distributions and energy to recoil can be obtained.…”