Morphology and structure of polymer fluorocarbon coatings on polyimide by sputtering

Qi, Hongjin; Zhang, Yuhui; Jian-feng, DI; Du, Wenqin

doi:10.1016/j.surfcoat.2006.07.222

Cited by 13 publications

(13 citation statements)

References 12 publications

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“…However, further increase of the FC coating thickness results in the increase of γs P /γs d , for example, γs P /γs d .= 1715 corresponding to the 113 nm FC layer. The increase of γs P /γs d .is probably caused by the imperfect stacking of the FC layer which can be evidenced by the AFM results ( Figure 3) [35]. The chemical compositions of FC coatings show significant dependence on the layer thickness, i.e., sputtering duration.…”

Section: Methodsmentioning

confidence: 81%

Significantly Reduced Secondary-Electron-Yield of Aluminum Sheet with Fluorocarbon Coating

Wang

Zhao

et al. 2018

Coatings

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In this work, the surface of Al sheet was coated with a fluorocarbon (FC) thin film by radio frequency (RF) sputtering of polytetrafluoroethylene (PTFE) to investigate the influence of dielectric coatings on the secondary electron yield (SEY) behavior of Al sheets. Atomic-force microscopy (AFM) and energy-dispersive spectroscopy (EDS) were employed to identify the surface topographies and elemental contents of the samples with FC coatings. Water contact angle (WCA) measurements were performed to characterize the surface tension as well as the polar and dispersion components of the samples' surface. The secondary electron-mission (SEE) behavior of the samples was determined by measuring the SEY coefficients in an ultra-high vacuum chamber with three electron guns. The experimental results indicated that the longer sputtering time effectively led to the increase in coating thickness and a higher ratio of F/C, as well as the continued decrease of surface tension. A quite thin FC coating of about 11.3 nm on Al sheet resulted in the value of maximum SEY (δ max ) dropping from 3.02 to 1.85. The further increase in coating thickness beneficially decreased δ max down to 1.60, however, at the cost of a ten-fold thicker coating (ca. 113 nm). It is found that increasing the coating thickness contributes to reducing SEY coefficients as well as suppressing SEE. The results are expected to guide the design of dielectric-coating for SEY reduction as well as multipactor suppression on Al.2 of 12 of a sample surface can be tailored to create triangular, rectangular and micro-porous grooves through several approaches such as laser lithography and laser and chemical etching. Parts of the primary incident electrons are trapped in the grooved structures by changing its trajectory, thus restraining SEE [9][10][11][12]. On the premise of a large depth-to-width ratio and high aspect ratio, rough surfaces with irregular structures created by artificial means also work. The surface roughness is likely to act as a blackbody or rough surface cage. Particle bombardment is an emerging and promising method to prepare rough surfaces with reduced SEY. Yang et al. [13] found that argon ion sputtering reduced the SEY of gold by eliminating contamination but also the roughing surface induced ion bombardment. An "equivalent work-function" relating the effect of contamination and surface roughness was proposed to predict SEY. Furthermore, Hu et al. [14] analyzed the influence of bombardment intensity and ion energy on the SEY of copper plates. Based on different surface topographies fabricated by ion bombardment, the optimized ion-beam parameters to achieve the lowest SEY of copper were obtained. In association with the experimental construction of rough structures, numerical simulation and dynamic calculation have developed rapidly. Theoretical research has mainly focused on building up rough-structure models, which consider the energy and incident angle of primary electrons. Chang et al. [15] applied particle-in-cell simulation to analyze the chang...

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Section: Methodsmentioning

confidence: 81%

Significantly Reduced Secondary-Electron-Yield of Aluminum Sheet with Fluorocarbon Coating

Wang

Zhao

et al. 2018

Coatings

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“…While it is not fully understood, similar film disparities have been documented on different polymer substrates. 5 Some explanation is necessary for the roughness observed on the third run. Higher deposition rates were observed for this deposition at the same power supply output and chamber pressure value of previous runs.…”

Section: Resultsmentioning

confidence: 98%

“…The trend of decreasing index between film 1 and films 2 and 3 is still present for the fits on both substrates. Others observed a trend of changing film structure from substrate to film surface in sputtered PTFE 5 . Table I gives the final thickness results and minimum mean squared error ͑MSE͒ found for each ellipsometry fit, as confirmed with AFM and profilometer measurements.…”

Section: Resultsmentioning

confidence: 99%

“…Fluoropolymers, primarily polytetrafluoroethylene ͑PTFE͒, have demonstrated an ability to be sputter coated in the past. [1][2][3][4][5][6] Although several groups have studied the surface properties, such as contact angle, morphology, and chemical composition of sputtered fluoropolymer films, [2][3][4][5][6] there has been no analysis of the optical properties of these films. Nevertheless, one would anticipate that sputtered films should exhibit optical properties similar to the bulk sample.…”

Section: Introductionmentioning

confidence: 99%

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Optical properties of sputtered fluorinated ethylene propylene and its application to surface-plasmon resonance sensor fabrication

Keathley

Hastings

2008

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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The optical properties of sputtered fluorinated ethylene propylene (FEP) thin films (100–400nm) were analyzed using spectroscopic ellipsometry. Glass (similar to BK7) and silicon substrates were used, and deposition rates on glass were found to be on average 37% higher than on silicon. Refractive indices of the deposited films at 630nm ranged from 1.379 to 1.392 on glass and from 1.381 to 1.417 on Si, which roughly corresponds to a 4.3% increase when compared to the bulk material value of 1.335. By using the optical properties of the deposited FEP films, it was shown through modeling that they present a possible alternative when fabricating dual-mode surface-plasmon resonance sensors that can differentiate bulk and surface refractive index changes.

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“…The chemical compositions and structures of the deposited films were analyzed using XPS (VG ESCA LABS5 spectrometer), in which the monochromatic Al Ka radiation was used as the X-ray source. The XPS curves were studied using a conventional analytical procedure [19,20]. The samples' hydrophobicity before and after the sputtering was tested by a static contact angle measurement (JC2000A) with conventional water droplet method and by a water repellency tester (Y(B)813) with standard GB/T4745-1997.…”

Section: Characterizationmentioning

confidence: 99%

Preparation and Characterization of FC Films Coated on PET Substrates by RF Magnetron Sputtering

Huang

2018

MATEC Web Conf.

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Abstract. Fluorocarbon (FC) films were prepared on polyethylene terephthalate (PET) plates and PET fabrics respectively by a radiofrequency (RF) magnetron sputtering technique using polytetrafluoroethylene (PTFE) as a target. Scanning electron microscope and X-ray photoelectron spectroscopy were used to investigate the morphology, structure and composition of the obtained FC films. The hydrophobicity and uvioresistant properties of the FC film coated fabric were studied. The results show that the FC films were successfully deposited on the PET substrates by a RF magnetron sputtering. The deposited films are made up of four components -CF3, -CF2-, CF-and -C-. The proportions of the four components and surface morphologies of the deposited films vary with the sputtering conditions. Compared with the original fabric samples, the hydrophobicity of the FC film coated fabrics is quite good and improved significantly.

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Morphology and structure of polymer fluorocarbon coatings on polyimide by sputtering

Cited by 13 publications

References 12 publications

Significantly Reduced Secondary-Electron-Yield of Aluminum Sheet with Fluorocarbon Coating

Significantly Reduced Secondary-Electron-Yield of Aluminum Sheet with Fluorocarbon Coating

Optical properties of sputtered fluorinated ethylene propylene and its application to surface-plasmon resonance sensor fabrication

Preparation and Characterization of FC Films Coated on PET Substrates by RF Magnetron Sputtering

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