2008 26th International Conference on Microelectronics 2008
DOI: 10.1109/icmel.2008.4559353
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MOS capacitors characterization under illumination

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Cited by 8 publications
(7 citation statements)
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“…The same oxide as in Figure 2 has been investigated using 600x600 ^m NiAu electrodes illuminated by a 20 mV laser, (wavelength 632.8 nm), leading to the macroscopic C-V of Figure 3. The creation of minority carriers which modify the capacity in depletion and inversion is evident in this figure and corresponds to the observations of reference [12].…”
Section: Influence Of the Lasersupporting
confidence: 89%
“…The same oxide as in Figure 2 has been investigated using 600x600 ^m NiAu electrodes illuminated by a 20 mV laser, (wavelength 632.8 nm), leading to the macroscopic C-V of Figure 3. The creation of minority carriers which modify the capacity in depletion and inversion is evident in this figure and corresponds to the observations of reference [12].…”
Section: Influence Of the Lasersupporting
confidence: 89%
“…As shown in Figure , both the two cells behave photoinduced positively charged inversion layer near the n-Si/oxide interface under 0 V applied gate bias, and holes are repelled out to the ITO layer. As for n-Si/TiO x /ITO cell, a clear light-driven transition from depletion to inversion can be observed in the capacitance–voltage characteristics, which is due to the decreased time constant for minority carrier generation and thinner SCR region under illumination, indicating a lateral transport of charges within the inversion layer. , It is not the same case with n-Si/ITO cell, in which the amount of charge is sustained and then decreased to a low value under high forward bias. The interfacial states in the n-Si/ITO cell may act as a blocking center, resisting the charge transport over very long distances (Figure S5b).…”
Section: Resultsmentioning
confidence: 93%
“…Conventional photocapacitive devices like Schottky diodes [1,2] work only on change in trap occupancy in the space charge region under illumination, which is usually small. Demonstrated MOS photocapacitors [3][4][5] use the modulation of inversion layer under illumination. We propose a novel design, which utilizes the physical mechanisms changing both active and imaginary device impedance (i.e.…”
Section: Introductionmentioning
confidence: 99%