2016
DOI: 10.1109/tasc.2016.2544821
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Multilayer Fabrication Process for Josephson Junction Circuits Cross-Compatible Over Two Foundries

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Cited by 11 publications
(10 citation statements)
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“…We present several important modifications to the JPA, the first of which is the fabrication of the Josephson junctions with the so-called side-wall passivated spacer (SWAPS) process that we introduced recently [32]. This enables us to largely avoid using plasma-enhanced chemical vapour deposited (PECVD) silicon dioxide which is a necessity in our standard niobium tunnel junction processes [33]. Measures to control the flux trapping are implemented as well.…”
Section: Introductionmentioning
confidence: 99%
“…We present several important modifications to the JPA, the first of which is the fabrication of the Josephson junctions with the so-called side-wall passivated spacer (SWAPS) process that we introduced recently [32]. This enables us to largely avoid using plasma-enhanced chemical vapour deposited (PECVD) silicon dioxide which is a necessity in our standard niobium tunnel junction processes [33]. Measures to control the flux trapping are implemented as well.…”
Section: Introductionmentioning
confidence: 99%
“… ( a ) Simplified schematic representation of the measurement setup (see Supplementary Figs 3 and 4 from Supplementary Note 7 for more detailed schematics). The investigated resonator was made using a capacitively shunted superconducting quantum interference device (SQUID), fabricated using a NbAlO x Nb trilayer process at VTT 57 . The device forms a flux tunable resonator which acts as a tunable boundary condition for the reflected waves in the attached 50 Ω transmission line 21 .…”
Section: Figurementioning
confidence: 99%
“…In this section we present a recently developed technological process [7], which is aimed to analogue sensor readout and signal multiplexing (so-called mixed signal superconductor technology), for operating temperatures down to 300 mK. At the end we will discuss recent results of its first implementation.…”
Section: Low-t C Junctionsmentioning
confidence: 99%