Multiphysics Analysis and Experimental Validation of an air Coupled Piezoelectric Micromachined Ultrasonic Transducer with Residual Stresses

Massimino, Gianluca; Dalessandro, L.; Procopio, F.; Ardito, Raffaele; Ferrera, Marco; Corigliano, Alberto

doi:10.1016/j.proeng.2016.11.289

Cited by 10 publications

(8 citation statements)

References 5 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The overall thickness of the multi-layered system is 7.445 µm. The PMUT is generally characterized by a high aspect ratio that gives the possibility of having a natural frequency suitable for different applications in a wide range of industrial fields [18]. The ROM technique used to create the PMUT is based on the coupling of 3D solid elements with thin shell structural elements.…”

Section: Single Pmut: Full-and Reduced-order Modelingmentioning

confidence: 99%

Efficient Modeling and Simulation of PMUT Arrays in Various Ambients

et al. 2022

View full text Add to dashboard Cite

This paper presents a numerical reduced-order modeling (ROM) approach for complex multi-layered arrays of piezoelectric micromachined ultrasonic transducers (PMUTs). The numerical modeling technique adopted to generate an array of PMUTs consisting of a considerable number of transducers allows for a large reduction in computational cost without reducing accuracy. The modeling idea is based on coupling shell elements applied to the PMUT structural layers with 3D-solid elements applied to the piezoelectric layer. A set of eigenfrequency and frequency domain analyses are presented considering a single ROM of a PMUT performing in different ambients and the performing central frequencies are obtained for every considered scenario. A unique arrangement of 228 PMUTs is presented and tested for its ability to transmit and receive acoustic waves. The operating frequency band of the array and the level of interference and cross-talk among different PMUTs in the near field are estimated. Finally, the results from a preliminary experimental test performed to analyze the acoustic abilities of an 8 × 8 array of PMUTs are presented. A corresponding numerical model is created and the obtained results matched the experimental data, leading to a validation of the modeling technique proposed in this work.

show abstract

Section: Single Pmut: Full-and Reduced-order Modelingmentioning

confidence: 99%

Efficient Modeling and Simulation of PMUT Arrays in Various Ambients

et al. 2022

View full text Add to dashboard Cite

show abstract

“…In the numerical model the electro-mechanical-acoustic (EMA) coupling was taken into account, for a fully 3D modelling of the device and the surrounding air. The thermo-viscous acoustics model for the air near to the vibrating diaphragms, which was considered in Reference [25], is here neglected since the primary focus is on the pressure and Sound-Pressure-Level (SPL) far-field responses.…”

Section: Numerical Modelling For the Single Transducermentioning

confidence: 99%

On the Effects of Package on the PMUTs Performances—Multiphysics Model and Frequency Analyses

et al. 2020

View full text Add to dashboard Cite

This paper deals with a multiphysics numerical modelling via finite element method (FEM) of an air-coupled array piezoelectric micromachined ultrasonic transducers (PMUTs). The proposed numerical model is fully 3D with the following features: the presence of the fabrication induced residual stresses, which determine a geometrically non-linear initial deformed configuration of the diaphragms and a remarkable shift of the fundamental frequency; the multiple coupling between different physics, namely electro-mechanical-coupling for the piezo-electric model, acoustic-structure interaction at the acoustic-structure interface and pressure acoustics in the surrounding air. The model takes into account the complete set of PMUTs belonging to the silicon die in a 4 × 4 array configuration and the protective package, as well. The results have been validated by experimental data, in terms of initial static pre-deflected configuration of the diaphragms and frequency response function of the PMUT. The numerical procedure was applied, to analyze different package configurations of the device, to study the influence of the holes on the acoustic transmission in terms of SPL and propagation pattern and consequently extract a set of design guidelines.

show abstract

“…The transducer is clamped over an air-filled closed cylindrical cavity with height equal to 400 µm and the same radius of the upper diaphragm. [19,20]. The computed Rayleigh damping parameters refer to ξ = 1/(2Q struct ) where Q struct is the imposed structural quality factor in correspondence of the performing fundamental electro-mechanical eigenmode.…”

Section: Numerical Modelling For the Single Transducermentioning

confidence: 99%