2003
DOI: 10.1007/s00340-003-1216-5
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Multiple air-gap filters and constricted mesa lasers – material processing meets the front of optical device technology

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Cited by 3 publications
(6 citation statements)
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“…A larger spectral range of 1.15–1.8 µm (650 nm span) can, e.g., be bridged using a small array of only three InGaAs photodiodes and three corresponding MEMS tunable filters, which are spectrally neighbored and each tuning range is over 220 nm respectively. Many different designs of MEMS tunable filters in various material systems have been reported [ 37 , 38 , 39 , 40 , 41 , 42 , 43 , 44 , 45 , 46 , 47 , 48 , 49 , 50 , 51 , 52 , 53 , 54 , 55 , 56 ]. As an example, Figure 12a displays an SEM micrograph top-view of one of our InP-multiple airgap MEMS FP filters; circular central membranes are elastically fixed by four suspensions to four supporting posts.…”
Section: Fabrication and Characterization Of Mems Tunable Fp Filtementioning
confidence: 99%
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“…A larger spectral range of 1.15–1.8 µm (650 nm span) can, e.g., be bridged using a small array of only three InGaAs photodiodes and three corresponding MEMS tunable filters, which are spectrally neighbored and each tuning range is over 220 nm respectively. Many different designs of MEMS tunable filters in various material systems have been reported [ 37 , 38 , 39 , 40 , 41 , 42 , 43 , 44 , 45 , 46 , 47 , 48 , 49 , 50 , 51 , 52 , 53 , 54 , 55 , 56 ]. As an example, Figure 12a displays an SEM micrograph top-view of one of our InP-multiple airgap MEMS FP filters; circular central membranes are elastically fixed by four suspensions to four supporting posts.…”
Section: Fabrication and Characterization Of Mems Tunable Fp Filtementioning
confidence: 99%
“…The n-doping of top DBR and p-doping of bottom-DBR allows actuation of the airgap cavity via the applied actuation voltage. Our group and others have reported on micromachined InP/airgap DBR-based vertical-cavity tunable filters by different approaches [ 41 , 44 , 45 , 46 , 47 , 48 , 49 , 50 , 51 , 52 , 53 , 54 , 55 , 56 ]. Due to shielding effects, the charges are mainly located at the inside surfaces of the two central membranes.…”
Section: Fabrication and Characterization Of Mems Tunable Fp Filtementioning
confidence: 99%
See 2 more Smart Citations
“…Concerning wavelength dispersing options for fiberoptic, sensor principles which (i) are compatible to fiber technology, (ii) have high resolution, and (iii) reveal strong miniaturization potential are considered. The following alternatives are included (and summarized in Figure 3): Static FP filter arrays on complementary metal oxide semiconductor (CMOS) sensor arrays or charge coupled devices (CCD) [28][29][30][31][32][33][34][35][36][37], MEMS tunable FP filter arrays [38][39][40][41][42][43][44][45][46][47][48][49][50][51][52][53][54][55][56][57] on photodetector (PD) arrays, AWG structures [21][22][23][24][25][26][27], MEMS tunable photonic crystal (PC) filters [62,[73][74][75][76][77], plasmonic MEMS cantilevers [68] and thermally tuned chirped fiber Bragg gratings (FBG). Compared to the mini grating spectrometers mention...…”
Section: Introductionmentioning
confidence: 99%