Nano-Ablation of Inorganic Materials Using Laser Plasma Soft X-rays at around 10 nm

Makimura, Tetsuya; Miyamoto, Hisao; Uchida, Satoshi; Fujimori, Takahiro; Niino, Hiroyuki; Murakami, Kouichi

doi:10.1143/jjap.45.5545

Cited by 6 publications

(2 citation statements)

References 21 publications

(23 reference statements)

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“…It has been proved in the early 2000s that high-quality nanometric pattern can be achieved on inorganic crystals via EUV direct writing with mask (figure 11). There is a linear relation between the shot number and ablation depth (0-2 µm), and machined surface roughness can reach 10 nm [101]. Monitor of the dynamic process by the pump-probe technique [102] reveals a rapid increase in the reflectivity of Si under 32.5 nm, 25 fs pulses.…”

Section: Short Wavelengthmentioning

confidence: 99%

Laser machining fundamentals: micro, nano, atomic and close-to-atomic scales

Wang

et al. 2023

Int. J. Extrem. Manuf.

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With the rapid development in advanced industries, such as microelectronics and optics sectors, the functional feature size of devises/components has been decreasing from micro to nanometric, and even atomic and close-to-atomic scale (ACS) for higher performance, smaller volume and lower energy consumption. By this time, a great many quantum structures are proposed, with not only an extreme scale of several or even single atom, but also a nearly ideal lattice structure with no material defect. It is almost no doubt that such structures play critical role in the next generation products, which shows an urgent demand for the atomic and close-to-atomic scale manufacturing (ACSM). Laser machining is one of the most important approaches widely used in engineering and scientific research. It is high-efficient and applicable for most kinds of materials. Moreover, the processing scale covers a huge range from millimeters to nanometers, and has already touches the atomic level. Laser-material interaction mechanism, as the foundation of laser machining, determines the machining accuracy and surface quality. It becomes much more sophisticated and dominant with a decrease in processing scale, which is systematically reviewed in this article. In general, the mechanisms of laser-induced material removal are classified into ablation, Coulomb explosion and atomic desorption, with a decrease in the scale from above microns to angstroms. The effects of processing parameters on both fundamental material response and machined surface quality are discussed, as well as theoretical methods to simulate and understand the underlying mechanisms. Examples at nanometric to atomic scale are provided, which demonstrate the capability of laser machining in achieving the ultimate precision and becoming a promising approach to ACSM.

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Section: Short Wavelengthmentioning

confidence: 99%

Laser machining fundamentals: micro, nano, atomic and close-to-atomic scales

Wang

et al. 2023

Int. J. Extrem. Manuf.

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“…The solid to liquid changes lead to lattice disturbance and growth of structures on the surface of the irradiated material which changes the surface properties. Therefore laser-produced X-rays are a very efficient source for nano-machining (18)(19)(20).…”

Section: Introductionmentioning

confidence: 99%

Surface modification of platinum by laser-produced X-rays

Latif

Rafique

Khaleeq-ur-Rahaman

et al. 2014

Radiation Effects and Defects in Solids

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Laser-induced plasma is used as an X-ray source for the growth of hillocks like nanostructures on platinum surface. To generate X-rays, plasma is produced by Nd:YAG laser, which is operated at second harmonics (λ = 532 nm, E = 400 mJ). Analytical grade 5 N pure Al, Cu and W are used as laser targets for X-rays production. X-rays produced from Al, Cu and W plasmas are used to irradiate three analytical grade (5 N pure) platinum substrates, respectively, under the vacuum ∼ 10 −4 torr. XRD analysis shows considerable structural changes in the exposed platinum. The decrement in reflection intensities, increment in dislocation line density, change in d-spacing and disturbance in the periodicity of planes evidently prove these structural changes. Atomic force microscope AFM topographic analysis of the platinum exposed to X-rays emitted from Al, Cu and W targets showed that nanometer-size hillocks are produced on the platinum surface irrespective of the source. It has also been observed that due to these hillocks, the roughness of the surface has increased. Conductivity of hillocks produced from X-rays produced by Al, Cu and W targets is compared and it is shown that the hillocks produced by Al target X-rays have better conductivity compared to the hillocks produced by X-rays from Cu and W targets.

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