Nanofabrication of subwavelength, binary, high-efficiency diffractive optical elements in GaAs

Abstract

A single-etch-step process for the fabrication of high-efficiency diffractive optical elements is presented. The technique uses subwavelength surface relief structures to create a material with an effective index of refraction determined by the fill factor of the binary pattern. Fabrication is performed using electron beam lithography and reactive-ion-beam etching on bulk GaAs, but the process is applicable to any material for which well-controlled etches exist. In this work, we designed and fabricated a blazed transmission grating for operation at 975 nm. The blazed grating exhibits a diffraction efficiency into the first order of 85% of the transmitted power.

Near-field enhanced femtosecond laser nano-drilling of glass substrate

“…Tel. : +65 6874 8707; fax: +65 6874 1349. lithography [4], and chemical etching. Femtosecond laser nanomachining is an attractive approach in the glass engineering with the advantages of elimination of collateral damage in dielectrics, reduction of heat-affected zones, and the ability to create subdiffraction limited target regions [5].…”

Nanopatterning mask fabrication by femtosecond laser irradiation

“…It is, however, a high challenge for glass processing to get nanostructures due to its hard, brittle, nonconductive and other inert properties. It also leads to many investigations on the sophisticated fabrication methods, such as nanoimprinting [11], electron beam lithography [12], and chemical etching. Laser microprocessing is an approach in glass engineering.…”

Quantitative Valuation Analysis of Surface Area of Low-dimensional Nanomaterials Based on Sensors

“…1D-nanostructure can expand surface area of every substrate. And the production of 1D-nanostructure with controllable method of processing [10][11][12] is attracting more and more attention. The application of nanostructures could be largely enhanced once nanostructures are precisely characterized with a new method of fractal theory (as shown in Figure 1) [13][14][15].…”