Near-field enhanced femtosecond laser nano-drilling of glass substrate

Laser surface micro-/nano-structuring by a simple transportable micro-sphere lens array

“…By laser interaction with the spherical particles, intensified optical fields are generated at the contact point of the sphere with the surface and cause substrate material ablation and removal. Although this method has been used to fabricate sub-micrometre or nano-holes on polymer, 4,5 metal, 6-8 semiconductor, 9,10 and dielectric substrates, [11][12][13] there are some significant limitations to this kind of laser processing. A prerequisite is that the substrate has to be hydrophilic to allow a monolayer to be formed by the self-assembly process.…”

“…Depending on the machining conditions, sometimes an enhanced optic field occurs even at the surface of the spheres. [11][12][13] Although attention should be paid to the impact of the laser structuring process on the spheres, to the best of authors' knowledge, such investigation has not been published. The results of this work reveal that the spheres are indeed susceptible to damage.…”

A study of Roman glass from Mala Barutana/Belgrade Fortress irradiated with pulsed CO2, Nd:YAG and ruby laser — Comparison

“…[1,2]. For these purposes their surface usually needs to be modified on micro and nano level, and one of the most advantageous techniques is laser processing [3,4].…”

Formation mechanism of nanostructures in soda–lime glass using femtosecond laser

“…Due to their key features compared to long pulsed and continuous wave lasers, such as the elimination of thermal effect and participation of various non-linear processes, femtosecond lasers have been widely used for the last few decades in the characterization [1][2][3] and micro/ nano-machining [4][5][6][7][8][9][10][11][12][13] of soda-lime glass. Promising applications of soda-lime glass processing based on femtosecond laser have been demonstrated in the formation of three-dimensional (3D) microchannel [4], microholes [5,6], nanoholes [7,8], optical gratings [9], optical data storage [10], color center [11], ZnO film deposition [12], and photonic devices [13].…”

“…Although many researchers have reported the fabrication of nanometric structures using femtosecond lasers, it is still a challenge to produce controllable nanometric structures with sizes of at most half of the incident light wavelength (λ i /2) or smaller using a femtosecond laser. Many researchers have reported nanofabrication using laser holographic technology [14], near-field enhancement induced by atomic force microscopy (AFM) or near-field scanning optical microscopy (NSOM) tips [15], and near-field enhancement induced by self-assembled particle lens array (PLA) [7,8]. However, nanostructuring based on PLA or AFM/NSOM can't produce any structure inside the sample.…”