Nanofabrication of x-ray zone plates using ultrananocrystalline diamond molds and electroforming

Wojcik, Michael; Joshi, Vishwanath; Sumant, Anirudha V.; Divan, Ralu; Ocola, Leonidas E.; Lu, Ming; Mancini, Derrick C.

doi:10.1116/1.3501357

Cited by 6 publications

(5 citation statements)

References 15 publications

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“…The FZP we used in this work contains 2 µm thick alternating gold and diamond zones [32]. The diameter is 180 µm with 80 nm outer-most zone width and a 30 µm diameter central stop.…”

Section: Focused Wavefront From the Fresnel Zone Platementioning

confidence: 99%

Quantitative X-ray wavefront measurements of Fresnel zone plate and K-B mirrors using phase retrieval

Huang¹,

Wojcik²,

Burdet³

et al. 2012

Opt. Express

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A scanning coherent diffraction imaging method was used to reconstruct the X-ray wavefronts produced by a Fresnel zone plate (FZP) and by Kirkpatrick-Baez (KB) focusing mirrors. The ptychographical measurement was conducted repeatedly by placing a lithographed test sample at different defocused planes. The wavefronts, recovered by phase-retrieval at well-separated planes, show good consistency with numerical propagation results, which provides a self-verification. The validity of the obtained FZP wavefront was further confirmed with theoretical predictions.

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“…The FZP we used in this work contains 2 µm thick alternating gold and diamond zones [32]. The diameter is 180 µm with 80 nm outer-most zone width and a 30 µm diameter central stop.…”

Section: Focused Wavefront From the Fresnel Zone Platementioning

confidence: 99%

Quantitative X-ray wavefront measurements of Fresnel zone plate and K-B mirrors using phase retrieval

Huang¹,

Wojcik²,

Burdet³

et al. 2012

Opt. Express

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show abstract

“…The top-down fabrication techniques have been successfully used to obtain predefined nanostructures on wafer-sized UNCD thin films [ 47 , 48 , 49 ]. Figure 3 illustrates the schematic of a typical top-down fabrication process based on EBL and RIE techniques and Figure 4 shows some examples of UNCD NWs and other nanodevices fabricated using this technique.…”

Section: Uncd Synthesis and Nw Fabricationsmentioning

confidence: 99%

Ultrananocrystalline Diamond Nanowires: Fabrication, Characterization, and Sensor Applications

et al. 2021

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The aim of this review is to provide a survey of the recent advances and the main remaining challenges related to the ultrananocrystalline diamond (UNCD) nanowires and other nanostructures which exhibit excellent capability as the core components for many diverse novel sensing devices, due to the unique material properties and geometry advantages. The boron or nitrogen doping introduced in the gas phase during deposition promotes p-type or n-type conductivity. With the establishment of the UNCD nanofabrication techniques, more and more nanostructure-based devices are being explored in measuring basic physical and chemical parameters via classic and quantum methods, as exemplified by gas sensors, ultraviolet photodetectors, piezoresistance effect-based devices, biological applications and biosensors, and nitrogen-vacancy color center-based magnetic field quantum sensors. Highlighted finally are some of the remaining challenges and the future outlook in this area.

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“…The top-down fabrication techniques have been successfully used to obtain predefined nanostructures on wafer size UNCD thin films [47][48][49]. Figure 3 illustrates the schematic of a typical top-down fabrication process based on EBL and RIE techniques and Figure 4 shows some examples of UNCD NWs and other nanodevices fabricated using this technique.…”

Section: Top-down Fabrication Technique Of Uncd Nanostructuresmentioning

confidence: 99%

Ultrananocrystalline Diamond Nanowires: Fabrication, Characterization, and Sensor Applications

Zhou¹,

Wang²,

Pacheco³

et al. 2021

Preprint

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The aim of this review is to provide a survey of the recent advances and the main remaining challenges related to the ultrananocrystalline diamond (UNCD) nanowires and other nanostructures which exhibit excellent capability as the core components for many diverse novel sensing devices, due to the unique material properties and geometry advantages. The doping introduced in the gas phase during deposition promotes p-type or n-type conductivity. With the establishment of the UNCD nanofabrication techniques, more and more nanostructure based devices are being explored in measuring basic physical and chemical parameters via classic and quantum methods, as exemplified by gas sensors, ultraviolet photodetectors, piezoresistance effect based devices, biological applications, and nitrogen-vacancy color center based magnetic field quantum sensors. Highlighted finally are some of the remaining challenges and future outlook in this area.

show abstract

Nanofabrication of x-ray zone plates using ultrananocrystalline diamond molds and electroforming

Cited by 6 publications

References 15 publications

Quantitative X-ray wavefront measurements of Fresnel zone plate and K-B mirrors using phase retrieval

Quantitative X-ray wavefront measurements of Fresnel zone plate and K-B mirrors using phase retrieval

Ultrananocrystalline Diamond Nanowires: Fabrication, Characterization, and Sensor Applications

Ultrananocrystalline Diamond Nanowires: Fabrication, Characterization, and Sensor Applications

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