Nanofabrication with proximal probes

Abstract

In this paper, we describe the use of proximal probes, such as the atomic force microscope (AFM)

Design and control of optimal feedforward trajectories for scanners: STM example

“…However, such distortions limit the use of STMs in real-time visualization of surface processes, and limit the use of STMs in real-time surface modification applications such as nanofabrication [21]. Therefore, compensating for the dynamics is critical to precision positioning during operation of the STM.…”

Design of hysteresis-compensating iterative learning control for piezo-positioners: Application to atomic force microscopes

“…Afterwards, the probe tip is scanned back and forth over the sample surface in the x-direction and slowly from top to bottom in the y-direction. The piezo-scanner positions the AFM-probe tip at a desired location for modifying or studying the sample surface; the probe tip can be used to create nanosized features by changing the interaction between the AFM-probe tip and sample surface [4,2,3] or for imaging a sample [25].…”

“…For example, during AFM-based nanofabrication, piezos are used to position the AFM-probe tip at a desired location and then a surface feature is created by changing the interaction between the AFM-probe tip and sample surface [1][2][3]. One common technique for creating surface features is to apply a voltage between the probe tip and sample surface to induce local anodic oxidation, e.g., see [1]; the feature sizes achieved with this technique is smaller than 100 nm [4,5]. In such nanofabrication applications, it is not only necessary to achieve precision in the AFMprobe-tip position to create nanosized features, but it is also necessary to achieve precision positioning over relatively long ranges (tens of microns), e.g., to pattern interconnects between devices and electrical-contact pads [1,5].…”

Electron beam induced oxidation of surfaces of Ni3Al-base alloys

“…Furthermore, these studies are important for lithography techniques in microelectronic device fabrication [8], exchange-bias junctions [9], aerospace technology [10,11], etc. Notably Ni 3 Al alloys have excellent resistance to oxidation because an adherent surface oxide ®lm is formed that protects the base metal from excessive attack [12].…”