Nanoindentation responses of InN thin films

Huang, Chih-Yen; Ke, Wen−Cheng

doi:10.1016/j.jallcom.2014.04.128

Cited by 14 publications

(7 citation statements)

References 32 publications

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“…Table II compares H NI and E c of InN films reported in the literature. [17][18][19][20][21][22] Results of the present research are intermediate among the scattered hardness and Young's moduli of InN films in a variety of thicknesses and growth surfaces by various growth methods. Results for H NI and E 1101 and E a using (1101) and (1120) faced InN films, respectively, are also included in the table, though such results seem to be rather preliminary since there is a scatter of H NI and E data values among the research groups.…”

Section: A Hardness and Young's Modulus Of Innmentioning

confidence: 54%

“…In addition, nano-indentation can elucidate elastic parameters such as Young's modulus and other moduli of a sample at RT. Indeed, some groups have adopted the nano-indentation method and evaluated the elastic moduli of InN thin film materials [17][18][19][20][21][22] although there is some scatter among the findings of hardness and moduli in the reported results, originating in the difference of growth methods and thickness of the samples employed. Thin film grown epitaxially as InN or other nitrides easily suffers effects of crystalline quality as well as those of the substrates.…”

Section: Introductionmentioning

confidence: 99%

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Elastic properties of indium nitrides grown on sapphire substrates determined by nano-indentation: In comparison with other nitrides

et al. 2015

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The hardness of wurtzite indium nitride (α-InN) films of 0.5 to 4 μm in thickness was measured by the nano-indentation method at room temperature. After investigation of crystalline quality by x-ray diffraction, the hardness and Young’s modulus were determined to be 8.8 ± 0.4 and 184 ± 5 GPa, respectively, for the In (0001)- and N (0001̄)-growth faces of InN films. The bulk and shear moduli were then derived to be 99 ± 3 and 77 ± 2 GPa, respectively. The Poisson’s ratio was evaluated to be 0.17 ± 0.03. The results were examined comprehensively in comparison with previously reported data of InN as well as those of other nitrides of aluminum nitride and gallium nitride. The underlying physical process determining the moduli and hardness was examined in terms of atomic bonding and dislocation energy of the nitrides and wurtzite zinc oxide.

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Section: A Hardness and Young's Modulus Of Innmentioning

confidence: 54%

Section: Introductionmentioning

confidence: 99%

Elastic properties of indium nitrides grown on sapphire substrates determined by nano-indentation: In comparison with other nitrides

et al. 2015

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“…Nanoindentation is a testing method that has been widely used to measure the elastic properties of micro- and nano-materials. With the feedback control system applied in this instrument, precise force-displacement data and curve can be obtained, from which hardness and elastic modulus can be determined [25]. To verify the obtained Young’s moduli of polysilicon and gold, nanoindentation method with the Berkovich diamond indenter using TI-750 nanoindentation (Hysitron, Inc., Minneapolis, MN, USA) has been implemented on the anchor regions of the test structures.…”

Section: Experiments and Discussionmentioning

confidence: 99%

A Novel Measurement Method of Mechanical Properties for Individual Layers in Multilayered Thin Films

et al. 2019

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Various multilayered thin films are extensively used as the basic component of some micro-electro-mechanical systems, requiring an efficient measurement method for material parameters, such as Young’s modulus, residual stress, etc. This paper developed a novel measurement method to extract the Young’s moduli and residual stresses for individual layers in multilayered thin films, based on the first resonance frequency measurements of both cantilever beams and doubly-clamped beams. The fabrication process of the test structure, the corresponding modeling and the material parameter extraction process are introduced. To verify this method, the test structures with gold/polysilicon bilayer beams are fabricated and tested. The obtained Young’s moduli of polysilicon films are from 151.38 GPa to 154.93 GPa, and the obtained Young’s moduli of gold films are from 70.72 GPa to 75.34 GPa. The obtained residual stresses of polysilicon films are from −14.86 MPa to −13.11 MPa (compressive stress), and the obtained residual stresses of gold films are from 16.27 to 23.95 MPa (tensile stress). The extracted parameters are within the reasonable ranges, compared with the available results or the results obtained by other test methods.

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“…This result was consistent with our earlier investigation. As explained by Jian and et al, 33 the hardness values obtained at the constant-value stage can be regarded as the intrinsic properties of the lms. The mechanical properties of the self-supporting membranes are critical to many applications and particular attention should be paid to the hardness, Young's modulus (E r ), and brittleness of the membranes.…”

Section: Membrane Preparation and Characterizationmentioning

confidence: 98%

Self-supporting hybrid silica membranes with 3D large-scale ordered interconnected pore architectures

Han

et al. 2015

RSC Adv.

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A simple and versatile method to form transferrable self-supporting membranes with a hierarchically ordered arrangement of nanometer size pores has been developed. The method relies on the formation of an ordered 3D arrangement of latex spheres on a sacrificial support, proper infusion of a suitably prepared organic-inorganic hybrid sol, followed by template removal without membrane destruction.Initially, the mechanical properties of self-supporting membranes prepared by combining a bi-functional silane (i.e., dimethyldimethoxysilane, DMDMOS) with tetramethoxysilane (TMOS) in different mole ratios were studied by nanoindentation. As the amount of DMDMOS increased, the hardness and Young's modulus decreased while the ratio of the two first decreased and then increased. The surface morphology and roughness as evaluated by Atomic Force Microscopy (AFM) also increased with the DMDMOS to TMOS ratio. Using a mole ratio of 1 : 1 and a close-packed 3D array of polystyrene spheres as a template, a flexible and transferrable membrane containing an ordered arrangement of interconnected pores of well-controlled size was constructed. The diameters and number of layers of the 3D pore architectures were manipulated by changing the microsphere diameter and concentration.Surface pore diameters ranged in size from 110-300 nm while the diameters of the internal pores ranged from 60-140 nm depending on the size of the original template. The number of layers ranged from two to five. Such self-supporting membranes, with their unique hierarchical, interconnected pore architectures over a large length scale, can be transferred to other surfaces for potential and promising applications in the fields of filtration, sensing and catalysis.

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Nanoindentation responses of InN thin films

Cited by 14 publications

References 32 publications

Elastic properties of indium nitrides grown on sapphire substrates determined by nano-indentation: In comparison with other nitrides

Elastic properties of indium nitrides grown on sapphire substrates determined by nano-indentation: In comparison with other nitrides

A Novel Measurement Method of Mechanical Properties for Individual Layers in Multilayered Thin Films

Self-supporting hybrid silica membranes with 3D large-scale ordered interconnected pore architectures

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