Nanomechanical Molecular Mass Sensing Using Suspended Microchannel Resonators

Abstract

In this work we study the different phenomena taking place when a hydrostatic pressure is applied in the inner fluid of a suspended microchannel resonator. Additionally to pressure-induced stiffness terms, we have theoretically predicted and experimentally demonstrated that the pressure also induces mass effects which depend on both the applied pressure and the fluid properties. We have used these phenomena to characterize the frequency response of the device as a function of the fluid compressibility and molecular masses of different fluids ranging from liquids to gases. The proposed device in this work can measure the mass density of an unknown liquid sample with a resolution of 0.7 µg/mL and perform gas mixtures characterization by measuring its average molecular mass with a resolution of 0.01 atomic mass units.

Recent Advances in Nanomechanical Membrane-Type Surface Stress Sensors towards Artificial Olfaction

“…7 zeptogram (10 −21 g) resolution by a cryogenically cooled apparatus in an ultrahigh vacuum (below 10 −10 torr) [ 62 ], and the mass resolution being less than 1 attogram (10 −18 g) in the air at room temperature [ 63 ]. Because of its high sensitivity, nanomechanical sensors in dynamic mode can be utilized for a new type of mass spectrometry known as nanomechanical mass spectrometry [ 26 , 28 , 61 , 64 , 65 , 66 , 67 , 68 , 69 ]. To improve the sensitivity further for the dynamic mode operation, various studies have reported, such as the use of other functional structures [ 32 , 43 , 70 , 71 , 72 ].…”

Compact Micro-Coriolis Mass-Flow Meter with Optical Readout

“…To prevent channel deformations due to pressure, particularly when the tube wall is relatively thin, it is necessary to have a circular cross-section for the channel [ 16 ]. In this regard, some devices were developed based on glass microcapillaries [ 19 , 20 , 21 , 22 , 23 ], 3D printing [ 24 ], and nickel electroplating [ 16 ]. The proposed glass microcapillaries are made by thermally elongating glass tubes.…”

Modeling, Fabrication, and Testing of a 3D-Printed Coriolis Mass Flow Sensor

“…Glass capillaries have been used successfully for density and mass sensing. However, these capillaries can only be fabricated as straight tubes [19][20][21][22].…”